High quality factor silicon cantilever transduced by piezoelectric lead zirconate titanate film for mass sensing applications

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 46, Issue 12, 2007, Pages 7643-7647

  Lu, Jian ^a   Ikehara, Tsuyoshi ^a   Zhang, Yi ^a   Mihara, Takashi ^b   Itoh, Toshihiro ^a   Maeda, Ryutaro ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b OLYMPUS CORPORATION   (Japan)

Author keywords

Energy dissipation; Mass sensor; MEMS; Micro cantilever; PZT film; Q factor; Sensitivity

Indexed keywords

ATMOSPHERIC PRESSURE; ENERGY DISSIPATION; LEAD COMPOUNDS; MEMS; PIEZOELECTRIC MATERIALS; Q FACTOR MEASUREMENT;

MASS SENSORS; MECHANICAL QUALITY FACTORS; MICRO-CANTILEVERS; PZT FILMS;

THIN FILMS;

EID: 37549067725     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.46.7643     Document Type: Article

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