The significance of the piezoelectric coefficient d31,eff determined from cantilever structures

Journal of Micromechanics and Microengineering

Volumn 23, Issue 2, 2013, Pages

  Dekkers, M ^a,b   Boschker, H ^a   Van Zalk, M ^a   Nguyen, M ^a,b,c   Nazeer, H ^b   Houwman, E ^b   Rijnders, G ^b  

^a SolMateS BV   (Netherlands)

^b UNIVERSITY OF TWENTE   (Netherlands)

^c HANOI UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Viet Nam)

Author keywords

[No Author keywords available]

Indexed keywords

CANTILEVER STRUCTURES; CRYSTAL ALIGNMENT; GEOMETRICAL ERROR; MEASUREMENT DATA; PIEZOELECTRIC COEFFICIENT; QUANTITATIVE DETERMINATIONS; RADIUS OF CURVATURE; RESONANCE AMPLIFICATION;

LEAD; PIEZOELECTRICITY;

NANOCANTILEVERS;

EID: 84874275318     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/23/2/025008     Document Type: Article

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