Time-resolved tunable diode laser absorption spectroscopy of excited argon and ground-state titanium atoms in pulsed magnetron discharges

Plasma Sources Science and Technology

Volumn 22, Issue 1, 2013, Pages

  Sushkov, V ^a   Do, H T ^a   Cada, M ^b   Hubicka, Z ^b   Hippler, R ^a  

^a UNIVERSITY OF GREIFSWALD   (Germany)

^b INSTITUTE OF PHYSICS   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON ATOMS; ATOM DENSITY; DIRECT CURRENT; DISCHARGE PULSE; ELECTRON-ION RECOMBINATIONS; PULSED MAGNETRON DISCHARGES; REPETITION FREQUENCY; TEMPORAL EVOLUTION; THERMAL EQUILIBRIUMS; THREE BODY; TIME DEPENDENCE; TIME-RESOLVED; TITANIUM ATOMS; TITANIUM TARGETS; TUNABLE DIODE LASER ABSORPTION SPECTROSCOPY;

GROUND STATE; MAGNETRON SPUTTERING; SEMICONDUCTOR LASERS; THERMAL CONDUCTIVITY; TITANIUM;

ATOMS;

EID: 84874026484     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/22/1/015002     Document Type: Article

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