Argon metastables in HiPIMS: Time-resolved tunable diode-laser diagnostics

Plasma Sources Science and Technology

Volumn 21, Issue 2, 2012, Pages

  Vitelaru, C ^a,b   Lundin, D ^c   Stancu, G D ^a   Brenning, N ^d   Bretagne, J ^a   Minea, T ^a  

^a UNIVERSITÉ PARIS SUD   (France)

^b ALEXANDRU IOAN CUZA UNIVERSITY OF IASI   (Romania)

^c LINKÖPING UNIVERSITY   (Sweden)

^d ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON METASTABLES; DE-EXCITATIONS; DENSE PLASMA; DISCHARGE CURRENTS; DISCHARGE PULSE; DOPPLER PROFILE; ELECTRON-IMPACT; ELECTRON-IMPACT EXCITATION; ELEMENTARY PROCESS; GAS DIFFUSION; GAS PRESSURES; GAS TEMPERATURE; HIGH POWER IMPULSE MAGNETRON SPUTTERING (HIPIMS); PEAK DISCHARGE; PLASMA DECAY; PULSE LENGTH; SPECTROSCOPY MEASUREMENTS; TIME-RESOLVED; TUNABLE DIODE LASERS;

ARGON; IMPACT IONIZATION; IONIZATION OF GASES; LASER DIAGNOSTICS;

ARGON LASERS;

EID: 84859604521     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/21/2/025010     Document Type: Article

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