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Volumn 27, Issue 3, 2009, Pages 471-478

Gas temperature measurement in C F4, S F6, O2, Cl2, and HBr inductively coupled plasmas

Author keywords

[No Author keywords available]

Indexed keywords

ARGON LASERS; BROMINE COMPOUNDS; CHLORINE COMPOUNDS; ELECTRIC DISCHARGES; ELECTROMAGNETIC INDUCTION; FLOW OF GASES; HIGH PRESSURE EFFECTS; INDUCTIVELY COUPLED PLASMA; TEMPERATURE MEASUREMENT;

EID: 65549089129     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3106626     Document Type: Article
Times cited : (44)

References (36)
  • 15
    • 65549109957 scopus 로고    scopus 로고
    • Ph.D. thesis, Universit́ Joseph Fourier.
    • G. Cunge, Ph.D. thesis, Universit́ Joseph Fourier, 1997.
    • (1997)
    • Cunge, G.1
  • 33
    • 65549133923 scopus 로고    scopus 로고
    • NIST chemistry webbook
    • NIST chemistry webbook: www.nist.gov


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.