Gas temperature measurement in C F4, S F6, O2, Cl2, and HBr inductively coupled plasmas

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 27, Issue 3, 2009, Pages 471-478

  Cunge, G ^a   Ramos, R ^a   Vempaire, D ^a   Touzeau, M ^a   Neijbauer, M ^a,b   Sadeghi, N ^a  

^a CEA LETI   (France)

^b INSTITUTE OF PHYSICAL CHEMISTRY   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON LASERS; BROMINE COMPOUNDS; CHLORINE COMPOUNDS; ELECTRIC DISCHARGES; ELECTROMAGNETIC INDUCTION; FLOW OF GASES; HIGH PRESSURE EFFECTS; INDUCTIVELY COUPLED PLASMA; TEMPERATURE MEASUREMENT;

GAS TEMPERATURE MEASUREMENTS; INDUCTIVELY-COUPLED; LASER-INDUCED FLUORESCENCE TECHNIQUE; METASTABLE ATOMS; NEUTRAL GAS TEMPERATURES; RADIO FREQUENCY POWER; TEMPERATURE JUMP; THERMAL ACCOMMODATION;

GASES;

EID: 65549089129     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3106626     Document Type: Article

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