Blue diode laser absorption spectroscopy of pulsed magnetron discharge

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 45, Issue 10 B, 2006, Pages 8090-8094

  Olejnicek, Jiri ^a   Do, Hoang Tung ^b   Hubicka, Zdenek ^a   Hippler, Rainer ^b   Jastrabik, Lubomir ^a  

^a INSTITUTE OF PHYSICS   (Czech Republic)

^b UNIVERSITY OF GREIFSWALD   (Germany)

Author keywords

Absorption spectroscopy; Aluminium; Concentration; Hysteresis; Oxidation; Poisoning; Pulsed magnetron; Temperature

Indexed keywords

ABSORPTION SPECTROSCOPY; ALUMINUM; ARGON; ELECTRIC DISCHARGES; SPUTTER DEPOSITION;

POISONING; PULSED MAGNETRON;

SEMICONDUCTOR LASERS;

EID: 34547871327     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.45.8090     Document Type: Article

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