Production of Ar metastable atoms in the late afterglow of pulse-modulated rf magnetron sputtering plasmas

Journal of Physics D: Applied Physics

Volumn 41, Issue 3, 2008, Pages

  Nafarizal, N ^a   Takada, N ^a   Sasaki, K ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FLUORESCENCE; MAGNETRON SPUTTERING; OPTICAL EMISSION SPECTROSCOPY; PLASMAS; SPECTROSCOPIC ANALYSIS;

DENSITY DISTRIBUTION; FLUORESCENCE IMAGING SPECTROSCOPY; METASTABLE ATOMS; OPTICAL EMISSION INTENSITY;

ARGON;

EID: 43049100776     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/41/3/035206     Document Type: Article

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