Fabrication and characterization of micromachined piezoelectric T-Beam actuators

Journal of Microelectromechanical Systems

Volumn 22, Issue 1, 2013, Pages 163-169

  Mateti, Kiron ^a   Zhang, Zheqian ^b,c   Rahn, Christopher D ^a   Tadigadapa, Srinivas ^a  

^a The Pennsylvania State University   (United States)

^b PENNSYLVANIA STATE UNIVERSITY   (United States)

^c BinOptics Corporation   (United States)

Author keywords

Actuator modeling; lead zirconate titanate (PZT); microelectromechanical systems (MEMS); micromachined actuators; piezoelectric actuators; T beam structures

Indexed keywords

BLOCKING FORCES; HIGH ASPECT RATIO; IMPEDANCE RESPONSE; IN-PLANE DISPLACEMENT; LEAD ZIRCONATE TITANATE; MICRO-ELECTRO-MECHANICAL; MICROMACHINED; MICROMACHINED ACTUATORS; OUT-OF-PLANE; OUT-OF-PLANE DISPLACEMENT; OUT-OF-PLANE MOTION; PIEZOELECTRIC CANTILEVER BEAMS; RESONANCE FREQUENCIES; STATIC DEFLECTIONS; T BEAMS; TIP DISPLACEMENT;

ASPECT RATIO; ELECTROMECHANICAL DEVICES; ELECTROSTATIC ACTUATORS; FABRICATION; MEMS; PIEZOELECTRICITY; SEMICONDUCTING LEAD COMPOUNDS;

PIEZOELECTRIC ACTUATORS;

EID: 84873299050     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2012.2221682     Document Type: Article

References (39)

1. Q. Q. Zhang, S. J. Gross, S. Tadigadapa, T. N. Jackson, F. T. Djuth, and S. Trolier-McKinstry, "Lead zirconate titanate films for d33 mode cantilever actuators," Sens. Actuators A, Phys., vol. 105, no. 1, pp. 91-97, Jun. 2003.
2. X. Xiao-Hui, B.-Q. Li, Y. Feng, and J.-R. Chu, "Design, fabrication and characterization of a bulk-PZT-actuated MEMS deformable mirror," J. Micromech. Microeng., vol. 17, no. 12, pp. 2439-2446, Dec. 2007. (Pubitemid 350242885)
3. S. J. Gross, S. Tadigadapa, T. N. Jackson, S. Trolier-McKinstry, and Q. Q. Zhang, "Lead-zirconate-titanate-based piezoelectric micromachined switch," Appl. Phys. Lett., vol. 83, no. 1, pp. 174-176, Jul. 2003.
4. Y. Nemirovsky, A. Nemirovsky, P.Muralt, and N. Setter, "Design of novel thin-film piezoelectric accelerometer," Sens. Actuators A, Phys., vol. 56, no. 3, pp. 239-249, Sep. 1996. (Pubitemid 126366465)
5. H. G. Yu, L. Zou, K. Deng, R. Wolf, S. Tadigadapa, and S. Trolier-McKinstry, "Lead zirconate titanate MEMS accelerometer using interdigitated electrodes," Sens. Actuators A, Phys., vol. 107, no. 1, pp. 26-35, Oct. 2003.
6. K. Oldham, C.-H. Rhee, J.-H. Ryou, R. Polcawich, and J. Pulskamp, "Lateral thin-film piezoelectric actuators for bio-inspired micro-robotic locomotion," in Proc. ASME Conf., 2009, vol. 6, pp. 759-768.
7. J. R. Bronson, J. S. Pulskamp, R. G. Polcawich, C. M. Kroninger, and E. D. Wetzel, "PZT MEMS actuated flapping wings for insect-inspired robotics," in Proc. IEEE 22nd Int. Conf. MEMS, 2009, pp. 1047-1050.
8. P. Muralt, "Ferroelectric thin films for micro-sensors and actuators: A review," J. Micromech. Microeng., vol. 2, no. 10, pp. 136-146, Jun. 2000.
9. S. Trolier-Mckinstry and P. Muralt, "Thin film piezoelectrics for MEMS," J. Electroceram., vol. 12, no. 1, pp. 7-17, Jan.-Mar. 2004.
10. S. Tadigadapa and K. Mateti, "Piezoelectric MEMS sensors: state-ofthe-art and perspectives," Meas. Sci. Technol., vol. 20, no. 9, p. 092001, Sep. 2009.
11. N. Setter, N.M.White, S. P. Beeby, and N. J. Grabham, "Thick-film piezoelectric and magnetostrictive devices," in Electroceramic-Based MEMS., H. L. Tuller, Ed. New York: Springer-Verlag, 2005, pp. 49-79.
12. I. Y. Shen, G. Z. Cao, C.-C.Wu, and C.-C. Lee, "PZT thin-film meso-and micro devices," Ferroelectrics, vol. 342, no. 1, pp. 15-34, Oct. 2006.
13. T. Hata, S. Kawagoe, W. Zhang, K. Sasaki, and Y. Yoshioka, "Proposal of new mixture target for PZT thin films by reactive sputtering," Vacuum, vol. 51, no. 4, pp. 665-671, Dec. 1998. (Pubitemid 128419355)
14. C.-Y. Pan, Y.-L. Chen, and D.-S. Tsai, "Synthesis and properties of lead zirconate titanate thin films via metalorganic chemical vapor deposition," J. Mater. Res., vol. 17, no. 6, pp. 1536-1542, Jun. 2002. (Pubitemid 34789770)
15. R. Maas,M. Koch, N. R. Harris, N. M. White, and A. G. R. Evans, "Thickfilm printing of PZT onto silicon," Mater. Lett., vol. 31, no. 1/2, pp. 109-112, May 1997.
16. S. L. Kok, N. M. White, and N. R. Harris, "Free-standing thickfilm piezoelectric device," Electron. Lett., vol. 44, no. 4, pp. 280-281, Feb. 2008.
17. T. Kobayashi, J. Tsaur, M. Ichiki, and R. Maeda, "Fabrication of flat PZT cantilevers through MEMS technologies and application to optical MEMS," Key Eng. Mater., vol. 301, pp. 37-40, 2006. (Pubitemid 43373077)
18. H. G. Yu, S. Tadigadapa, and S. Trolier-McKinstry, "MEMS flextensional actuator using lead zirconate titanate thin film," in Proc. IEEE 18th Int. Conf. MEMS, 2005, pp. 375-378. (Pubitemid 41462375)
19. P. Muralt, N. Ledermann, J. Paborowski, A. Barzegar, S. Gentil, B. Belgacem, S. Petitgrand, A. Bosseboeuf, and N. Setter, "Piezoelectric micromachined ultrasonic transducers based on PZT thin films," IEEE Trans. Ultrason., Ferroelectr., Freq. Control, vol. 52, no. 12, pp. 2276-2288, Dec. 2005. (Pubitemid 43254193)
20. S. Gross, "Micromachined switches and cantilever actuators based on piezoelectric lead zirconate titanate (PZT)," Ph.D. dissertation, Dept. Elect. Eng., The Pennsylvania State Univ., Univ. Park, PA, 2004.
21. R. N. Torah, S. P. Beeby, and N. M. White, "Improving the piezoelectric properties of thick-film PZT: The influence of paste composition, powder milling process and electrode material," Sens. Actuators A, Phys., vol. 110, no. 1-3, pp. 378-384, Feb. 2004.
22. X.-Q. Sun, T. Masuzawa, and M. Fujino, "Micro ultrasonic machining and its applications in MEMS," Sens. Actuators A, Phys., vol. 57, no. 2, pp. 159-164, Nov. 1996. (Pubitemid 126371396)
23. H. K. R. Kommepalli, "Design, modeling and optimization of piezoelectric actuators," Ph.D. dissertation, Dept. Mech. Eng., The Pennsylvania State Univ., Univ. Park, PA, 2010.
24. M. Eyett, D. Bauerle, W. Wersing, and H. Thomann, "Excimer- laserinduced etching of ceramic PbTi[sub 1-x]Zr[sub x]O[sub 3]," J. Appl. Phys., vol. 62, no. 4, pp. 1511-1514, Aug. 1987.
25. S. Trolier, C. Geist, A. Safari, R. E. Newnham, and Q. C. Xu, "Etched piezoelectric structures," in Proc. 6th IEEE Int. Symp. Appl. Ferroelectrics, 1986, pp. 707-710.
26. T. Li and Y. B. Gianchandani, "A micromachining process for die-scale pattern transfer in ceramics and its application to bulk piezoelectric actuators," J. Microelectromech. Syst., vol. 15, no. 3, pp. 605-612, Jun. 2006. (Pubitemid 43891356)
27. V. F. Janas and A. Safari, "Overview of fine-scale piezoelectric ceramic/polymer composite processing," J. Amer. Ceram. Soc., vol. 78, no. 11, pp. 2945-2955, Nov. 1995.
28. A. Goyal, J. Cheong, and S. Tadigadapa, "Tin-based solder bonding for MEMS fabrication and packaging applications," J. Micromech. Microeng., vol. 14, no. 6, pp. 819-825, Jun. 2004.
29. M. Bale and R. E. Palmer, "Deep plasma etching of piezoelectric PZT with SF[sub 6]," J. Vac. Sci. Technol. B,Microelectron. Nanometer Struct., vol. 19, no. 6, pp. 2020-2025, Nov. 2001. (Pubitemid 34089693)
30. S. Wang, X. Li, K. Wakabayashi, and M. Esashi, "Deep reactive ion etching of lead zirconate titanate using sulfur hexafluoride gas," J. Amer. Ceram. Soc., vol. 82, no. 5, pp. 1339-1641, May 1999.
31. Z. Zhang, K. Mateti, C. Rahn, and S. Tadigadapa, "Micromachined multifunctional piezoelectric T-beam transducers," in Proc. Solid State Sensors, Actuators Microsyst. Workshop, Hilton Head Island, SC, 2010.
32. F. Shang, T. Kitamura, H. Hirakata, I. Kanno, H. Kotera, and K. Terada, "Experimental and theoretical investigations of delamination at free edge of interface between piezoelectric thin films on a substrate," Int. J. Solids Struct., vol. 42, no. 5/6, pp. 1729-1741, Mar. 2005.
33. H. K. R. Kommepalli, K. Mateti, C. D. Rahn, and S. A. Tadigadapa, "Piezoelectric T-beam actuators," J. Mech. Design, vol. 133, no. 6, p. 061003, Jun. 2011.
34. S. S. Subasinghe, A. Goyal, and S. Tadigadapa, "High aspect ratio plasma etching of bulk lead zirconate titanate," in Proc. SPIE, Micromach. Microfabric. Process Technol. XI, San Jose, CA, 2006, pp. 100-108.
35. S. Tadigadapa and F. Laermer, "Dry etching for micromachining applications," in Handbook of MEMs Materials and Processes, R. Ghodssi and P. Lin, Eds. Boston, MA: Springer Business and Media, 2010.
36. J. Cheong, A. Goyal, S. Tadigadapa, and C. Rahn, "Reliable bonding using indium-based solders," in Proc. Reliab., Testing, Characterization MEMS/MOEMS III, San Jose, CA, 2004, pp. 114-120.
37. Techni Nickel S MSDS, Technic Inc., Cranston, RI, 2009, ed.
38. S. S. Subasinghe, "Plasma etching of bulk lead zirconate titanate for microsystems applications," M.S. Thesis, Dept. Elect. Eng., The Pennsylvania State Univ., Univ. Park, 2006.
39. R. D. Blevins, Formulas for Natural Frequency and Mode Shape. Melbourne, FL: Krieger, 1984.