Thick-film printing of PZT onto silicon

Materials Letters

Volumn 31, Issue 1-2, 1997, Pages 109-112

  Maas, R ^a   Koch, M ^a   Harris, N R ^a   White, N M ^a   Evans, A G R ^a  

^a UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

Barrier layer; Diffusion; Piezoelectric; PZT; Screen printing; Silicon; Thick film

Indexed keywords

INK; PIEZOELECTRIC MATERIALS; SCREEN PRINTING; SEMICONDUCTING LEAD COMPOUNDS; SEMICONDUCTING SILICON; SUBSTRATES; THICK FILMS; THIN FILMS;

BARRIER LAYER; LEAD ZIRCONATE TITANATE;

FERROELECTRIC MATERIALS;

EID: 0031146921     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-577X(96)00249-2     Document Type: Article

References (3)

1. Y.L. Tu and S.J. Milne, J. Mater. Sci. 30 (1995) 2507.
2. K.E. Petersen, Proc. IEEE 70 (1982) 420.
3. N.M. White, Hybrid Circuits, September 1989, pp. 23-27.