MEMS flextensional actuator using lead zirconate titanate thin film

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2005, Pages 375-378

  Yu, H G ^a   Tadigadapa, S ^a   Trolier McKinstry, S ^b  

^a The Pennsylvania State University   (United States)

^b PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LEAD ZIRCONATE TITANATE (PZT); PIEZOELECTRIC ACTUATORS; PIEZOELECTRIC FLEXTENSIONAL MICROACTUATORS; UNIMORPH ACTUATORS;

AMPLIFICATION; LEAD COMPOUNDS; LIGHT INTERFERENCE; MICROACTUATORS; MICROMACHINING; NATURAL FREQUENCIES; OPTICAL MICROSCOPY; PHOTOLITHOGRAPHY; SILICON; THIN FILMS; VACUUM APPLICATIONS;

MICROELECTROMECHANICAL DEVICES;

EID: 26844547104     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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