Micromachined multifunctional piezoelectric T-beam transducers

Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Volumn , Issue , 2010, Pages 246-249

  Zhang, Z ^a   Mateti, K ^a   Rahn, C D ^a   Tadigadapa, S ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; BEAMS AND GIRDERS; LEAD ZIRCONATE TITANATE; MICROSYSTEMS; PIEZOELECTRICITY;

ACCELERATION SENSITIVITY; DEEP REACTIVE ION ETCHING; IN-PLANE DISPLACEMENT; OUT-OF-PLANE DISPLACEMENT; PIEZOELECTRIC CANTILEVER BEAMS; SELECTIVE ACTIVATION; SENSING APPLICATIONS; T SHAPED CROSS SECTION;

SOLID-STATE SENSORS;

EID: 85031240116     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.31438/trf.hh2010.65     Document Type: Conference Paper

References (10)

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