Fabrication of flat PZT cantilevers through MEMS technologies and application to optical MEMS

Key Engineering Materials

Volumn 301, Issue , 2006, Pages 37-40

  Kobayashi, Takeshi ^a   Tsaur, Jiunnjye ^a   Ichiki, Masaaki ^a   Maeda, Ryutaro ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Cantilever; Film; MEMS; Optical MEMS; PZT; Scanner

Indexed keywords

FILMS; LEAD COMPOUNDS; MICROELECTROMECHANICAL DEVICES; MULTILAYERS;

CANTILEVER; OPTICAL MEMS; PZT; SCANNER;

CERAMIC MATERIALS;

EID: 33644855669     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: 10.4028/0-87849-982-2.37     Document Type: Conference Paper

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