Free-standing thick-film piezoelectric device

Electronics Letters

Volumn 44, Issue 4, 2008, Pages 280-282

  Kok, S L ^a   White, N M ^a   Harris, N R ^a  

^a UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC LOADS; ELECTRIC RESISTANCE; ELECTRODES; THICK FILMS;

CANTILEVER SENSOR; CARBON SACRIFICIAL LAYER;

PIEZOELECTRIC DEVICES;

EID: 39349111682     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:20083232     Document Type: Article

References (6)

1. Stecher, G.: ' Free supporting structures in thick-film technology: a substrate integrated pressure sensor ', 6th, European Microelectronics Conf., Bournemouth, UK, 1987, p. 421-427
2. Jeon, Y.B., Sood, R., Jeong, J., and Kim, S.-G.: ' MEMS power generator with transverse mode thin film PZT ', Sens. Actuators A, 2005, 122, p. 16-22
3. Schmid, S., and Hierold, C.: ' Two sacrificial layer techniques for the fabrication of free-standing polymer micro structures ', MicroMechanics Europe Workshop, Southampton, UK, 2006, p. 177-180
4. Torah, R.N., Beeby, S.P., and White, N.M.: ' Improving the piezoelectric properties of thick-film PZT: the influence of paste composition, powder milling process and electrode material ', Sens. Actuators A, 2004, 110, p. 378-384
5. Birol, H., Maeder, T., Jacq, C., Corradini, G., Passerini, R., and Fournier, Y.: et al. ' Fabrication of LTCC micro-fluidic devices using sacrificial carbon layers ', Proc. 1st Int. Conf. Ceramic Interconnect and Ceramic Microsystems (CICMT), Baltimore, MD, US, 2005
6. Roundy, S., and Wright, P.K.: ' A piezoelectric vibration based generator for wireless electronics ', Smart Mater. Struct., 2004, 12, p. 1131-1142 0964-1726