Lead zirconate titanate MEMS accelerometer using interdigitated electrodes

Sensors and Actuators, A: Physical

Volumn 107, Issue 1, 2003, Pages 26-35

  Yu, Han Geun ^a   Zou, L ^b   Deng, K ^b   Wolf, R ^c   Tadigadapa, S ^a   Trolier McKinstry, S ^c  

^a The Pennsylvania State University   (United States)

^b Wilcoxon Research Inc   (United States)

^c PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

Interdigitated Electrode; Lead Zirconate Titanate (PZT); MEMS Accelerometer; Piezoelectric Accelerometer

Indexed keywords

ELECTRODES; LEAD COMPOUNDS; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRICITY;

INTERDIGITATED ELECTRODES;

ACCELEROMETERS;

EID: 0041780953     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(03)00271-1     Document Type: Article

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