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Journal of Physics D: Applied Physics

Volumn 46, Issue 4, 2013, Pages

Negative ion energy distributions in reactive HiPIMS

(3) Bowes, M a Poolcharuansin, P a Bradley, J W a

a UNIVERSITY OF LIVERPOOL (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

BACKGROUND GAS; DISCHARGE CONDITIONS; ENERGY DISTRIBUTIONS; ENERGY SPECTRA; ENERGY-RESOLVED MASS SPECTROMETRY; HIGH ENERGY; HIGH POWER IMPULSE MAGNETRON SPUTTERING (HIPIMS); ION ENERGY DISTRIBUTIONS; MASS DISTRIBUTION; PRESSURE-DISTANCE PRODUCTS; SPUTTERED PARTICLES; SUBSTRATE REGIONS; TARGET POTENTIAL; THOMPSON; TIME-AVERAGED ENERGY; TIO; TOTAL CROSS SECTION;

ELECTRIC POWER DISTRIBUTION; GAS MIXTURES; MASS SPECTROMETRY; TITANIUM;

NEGATIVE IONS;

EID: 84872393973 PISSN: 00223727 EISSN: 13616463 Source Type: Journal
DOI: 10.1088/0022-3727/46/4/045204 Document Type: Article

Times cited : (44)

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