Study of the gas rarefaction phenomenon in a magnetron sputtering system

Thin Solid Films

Volumn 515, Issue 2 SPEC. ISS., 2006, Pages 631-635

  Palmero, A ^a   Rudolph, H ^a   Habraken, F H P M ^a  

^a UTRECHT UNIVERSITY   (Netherlands)

Author keywords

Gas heating; Gas rarefaction; Keller Simmons formula; Magnetron sputtering

Indexed keywords

ALUMINUM; GAS HEATING; MATHEMATICAL MODELS; PARAMETER ESTIMATION; THIN FILMS;

ELASTIC SCATTERING; GAS RAREFACTION; KELLER SIMMONS FORMULA; SPUTTERED PARTICLES;

MAGNETRON SPUTTERING;

EID: 33748741872     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.12.225     Document Type: Article

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