Inhomogeneous rarefaction of the process gas in a direct current magnetron sputtering system

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 24, Issue 4, 2006, Pages 1530-1534

  Jimenez, F ^a   Ekpe, S D ^a   Dew, S K ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

GAS HEATING; ITERATIVE METHODS; MAGNETRON SPUTTERING; MATHEMATICAL MODELS; MONTE CARLO METHODS; PLASMAS; THERMAL CONDUCTIVITY; THIN FILMS;

GAS RAREFACTION; NONUNIFORM GRID;

GASES;

EID: 33745498762     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2210005     Document Type: Article

References (18)

1. D. W. Hoffman, J. Vac. Sci. Technol. A 3, 561 (1985).
2. S. M. Rossnagel, J. Vac. Sci. Technol. A 6, 19 (1988).
3. G. M. Turner, J. Vac. Sci. Technol. A 13, 2161 (1995).
4. S. D. Ekpe and S. K. Dew, J. Phys. D 39, 1413 (2006).
5. V. V. Serikov and K. Nanbu, J. Appl. Phys. 82, 5948 (1997).
6. K. Meyer, I. K. Schuller, and C. M. Falco, J. Appl. Phys. 52, 5803 (1981).
7. S. Leonard, M.Sc. thesis, University of Alberta, 2002.
8. A. Myers, J. Doyle, and J. Abelson, J. Vac. Sci. Technol. A 9, 614 (1991).
9. F. J. Jimenez, M.Sc. thesis, University of Alberta, 2005.
10. J. C. Tannehill, D. A. Anderson, and R. H. Pletcher, Computational Fluid Mechanics and Heat Transfer (Taylor & Francis, Washington, 1997).
11. S. V. Patankar, Numerical Heat Transfer and Fluid Flow (McGraw-Hill, New York, 1980).
12. H. K. Versteeg and W. Malalasekera, An Introduction to Computational Fluid Dynamics: The Finite Volume Method (Prentice Hall, New York, 1995).
13. T. Motohiro, J. Vac. Sci. Technol. A 4, 189 (1986).
14. M. Thompson, Philos. Mag. 18, 377 (1968).
15. M. Stepanova and S. Dew, J. Appl. Phys. 92, 1699 (2002).
16. M. D. Kilgore, H. M. Wu, and D. B. Greaves, J. Vac. Sci. Technol. B 12, 494 (1994).
17. J. Tynan, J. Appl. Phys. 86, 5356 (1999).
18. T. P. Drusedau, J. Vac. Sci. Technol. A 20, 459 (2002).