Analytical closed-form solutions for size-dependent static pull-in behavior in electrostatic micro-actuators via Fredholm integral equation

Sensors and Actuators, A: Physical

Volumn 190, Issue , 2013, Pages 32-43

  Rokni, Hossein ^a   Seethaler, Rudolf J ^b   Milani, Abbas S ^b   Hosseini Hashemi, Shahrokh ^c   Li, Xian Fang ^d  

^a UNIVERSITY OF MICHIGAN   (United States)

^b UNIVERSITY OF BRITISH COLUMBIA   (Canada)

^c IRAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Iran)

^d CENTRAL SOUTH UNIVERSITY   (China)

Author keywords

Analytical solution; Micro actuator; Pull in voltage; Size effect

Indexed keywords

CLOSED FORM SOLUTIONS; ELECTROSTATIC MICROACTUATORS; EULER BERNOULLI BEAMS; FIRST NATURAL MODES; FOURTH-ORDER DIFFERENTIAL EQUATIONS; FREDHOLM INTEGRAL EQUATIONS; FRINGING FIELD EFFECTS; MATERIAL LENGTH SCALE; MICRO BEAMS; MICROCANTILEVER BEAMS; NUMERICAL DATA; PULL-IN VOLTAGE; SHAPE FUNCTIONS; SIZE EFFECTS; SOLUTION PROCEDURE; STATIC PULL-IN; TENSILE RESIDUAL STRESS; VARIABLE COEFFICIENTS;

BOUNDARY CONDITIONS; CONTINUUM MECHANICS; ELECTROSTATIC ACTUATORS; INTEGRAL EQUATIONS; MICROACTUATORS; SIZE DETERMINATION;

NANOCANTILEVERS;

EID: 84870882548     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2012.10.035     Document Type: Article

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