Size effect on the static behavior of electrostatically actuated microbeams

Acta Mechanica Sinica/Lixue Xuebao

Volumn 27, Issue 3, 2011, Pages 445-451

  Yin, Li ^a,b   Qian, Qin ^a,b   Wang, Lin ^a,b  

^a HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

^b HUBEI KEY LABORATORY FOR ENGINEERING STRUCTURAL ANALYSIS AND SAFETY ASSESSMENT   (China)

Author keywords

Deflection; Electrostatically actuated microbeam; MEMS; Pull in voltage; Size effect

Indexed keywords

ANALYTICAL MODEL; BEAM THICKNESS; COUPLE STRESS THEORY; ELECTROSTATICALLY ACTUATED MICROBEAM; MATERIAL LENGTH SCALE; MICRO BEAMS; PULL-IN VOLTAGE; SIZE EFFECTS; STATIC BEHAVIORS; STRETCHING FORCE; THEORETICAL MODELS; TOTAL POTENTIAL ENERGY;

ELECTROSTATIC ACTUATORS; MATHEMATICAL MODELS; NUMERICAL ANALYSIS;

SIZE DETERMINATION;

EID: 80052501989     PISSN: 05677718     EISSN: None     Source Type: Journal    
DOI: 10.1007/s10409-011-0449-z     Document Type: Article

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