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Volumn 322, Issue 4-5, 2009, Pages 969-986

A large deflection model for the pull-in analysis of electrostatically actuated microcantilever beams

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; COMPOSITE MICROMECHANICS; DYNAMIC ANALYSIS; ELECTROSTATIC ACTUATORS;

EID: 63549130933     PISSN: 0022460X     EISSN: 10958568     Source Type: Journal    
DOI: 10.1016/j.jsv.2008.11.046     Document Type: Article
Times cited : (165)

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