Size-dependent pull-in instability of electrostatically actuated microbeam-based MEMS

Journal of Micromechanics and Microengineering

Volumn 21, Issue 2, 2011, Pages

  Wang, Binglei ^a,b   Zhou, Shenjie ^a   Zhao, Junfeng ^a   Chen, Xi ^b,c,d  

^a SHANDONG UNIVERSITY   (China)

^b Columbia University ^*  (United States)

^c XI'AN JIAOTONG UNIVERSITY   (China)

^d Hanyang University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

BEAM THICKNESS; EXPERIMENTAL DATA; MATERIAL LENGTH SCALE; MICRO BEAMS; POTENTIAL APPLICATIONS; PULL-IN INSTABILITY; PULL-IN VOLTAGE; SIZE EFFECTS; SMALL SIZE; STRAIN GRADIENT ELASTICITY;

ELECTROSTATIC ACTUATORS;

MECHANICAL PROPERTIES;

EID: 79551698686     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/2/027001     Document Type: Article

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