Experimental characterization of electrostatically actuated in-plane bending of microcantilevers

Microsystem Technologies

Volumn 14, Issue 7, 2008, Pages 909-918

  Ballestra, A ^a   Brusa, E ^b   Munteanu, M Gh ^b   Soma A ^a  

^a POLITECNICO DI TORINO   (Italy)

^b UNIVERSITY OF UDINE   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

BENDING MOMENTS; ELECTROSTATIC DEVICES; FINITE ELEMENT METHOD; MEMS; NONLINEAR ANALYSIS; WAFER BONDING;

ELECTROMECHANICAL EQUILIBRIUM; MICROCANTILEVERS; PULL-IN VOLTAGE;

MICROMECHANICS;

EID: 44249112330     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-008-0597-0     Document Type: Conference Paper

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