Closed-form empirical relations to predict the static pull-in parameters of electrostatically actuated microcantilevers having linear width variation

Microsystem Technologies

Volumn 17, Issue 1, 2011, Pages 35-45

  Joglekar, M M ^a   Pawaskar, D N ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY BOMBAY   (India)

Author keywords

[No Author keywords available]

Indexed keywords

3D FINITE-ELEMENT SIMULATION; CLOSED FORM; COMPUTATIONALLY EFFICIENT; ELECTRO MECHANICAL DESIGN; ELECTROMECHANICAL MODELS; ELECTROSTATICALLY ACTUATED MICROCANTILEVERS; EMPIRICAL ESTIMATE; EMPIRICAL RELATIONS; FINITE ELEMENT SIMULATIONS; FRINGING FIELDS; MICROCANTILEVER BEAMS; NON-LINEAR REGRESSION ANALYSIS; NUMERICAL DATA; PULL-IN; PULL-IN VOLTAGE; SINGLE DEGREE OF FREEDOMS; SURFACE FITTING; TAPERED WIDTH;

CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; ELECTROSTATIC ACTUATORS; FIBER OPTIC SENSORS; REGRESSION ANALYSIS; THREE DIMENSIONAL;

FINITE ELEMENT METHOD;

EID: 79251634931     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-010-1153-2     Document Type: Article

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