Reducing pull-in voltage by adjusting gap shape in electrostatically actuated cantilever and fixed-fixed beams

Micromachines

Volumn 1, Issue 2, 2010, Pages 68-81

  Haluzan, Darcy T ^a,b   Klymyshyn, David M ^a,b   Achenbach, Sven ^a,b   Börner, Martin ^c  

^a UNIVERSITY OF SASKATCHEWAN   (Canada)

^b TRLabs   (Canada)

^c KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

Actuator; Electrostatic; Finite element; Gap shape; High aspect ratio; Liga; Mems; Pull in voltage

Indexed keywords

FINITE ELEMENT; GAP SHAPE; HIGH ASPECT RATIO; LIGA; PULL-IN VOLTAGE;

ACTUATORS; ASPECT RATIO; CANTILEVER BEAMS; ELECTROSTATICS; MEMS;

ELECTROSTATIC ACTUATORS;

EID: 84870859598     PISSN: None     EISSN: 2072666X     Source Type: Journal    
DOI: 10.3390/mi1020068     Document Type: Article

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