Modeling the pull-in parameters of electrostatic actuators with a novel lumped two degrees of freedom pull-in model

Sensors and Actuators, A: Physical

Volumn 97-98, Issue , 2002, Pages 569-578

  Bochobza Degani, Ofir ^a   Nemirovsky, Yael ^a  

^a TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

Author keywords

Actuator; Electrostatic; L2DOF; Model; Pull in

Indexed keywords

ALGORITHMS; CALCULATIONS; COMPUTER SIMULATION; DEGREES OF FREEDOM (MECHANICS); ELECTRIC POTENTIAL; FINITE DIFFERENCE METHOD; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; OPTIMIZATION;

BOUNDARY ELEMENT; MICROMACHINED DEVICES; PULL-IN PARAMETER;

ELECTROSTATIC ACTUATORS;

EID: 0036544219     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00855-X     Document Type: Conference Paper

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