Generalized closed-form models for pull-in analysis of micro cantilever beams subjected to partial electrostatic load

Sensors and Actuators, A: Physical

Volumn 185, Issue , 2012, Pages 109-116

  Do, Cuong ^a   Lishchynska, Maryna ^a   Delaney, Kieran ^a   Hill, Martin ^a  

^a Department of Chemistry   (Ireland)

Author keywords

Cantilever; Closed form; Electrostatic actuators; Partial load; Static pull in

Indexed keywords

CANTILEVER; CLOSED FORM; CLOSED-FORM MODELS; CORRECTION FACTORS; ELECTROSTATIC ACTUATION; ELECTROSTATIC LOAD; FINITE ELEMENT METHOD SIMULATION; FRINGING FIELD EFFECTS; GENERALIZED MODELS; MICROCANTILEVER BEAMS; PARTIAL LOAD; PULL-IN; PULL-IN INSTABILITY; PULL-IN VOLTAGE; STATIC PULL-IN;

ELECTROSTATIC ACTUATORS; FINITE ELEMENT METHOD;

CANTILEVER BEAMS;

EID: 84865600358     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2012.07.020     Document Type: Article

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