Origin of a needle-like granular structure for ultrananocrystalline diamond films grown in a N 2/CH 4 plasma

Journal of Physics D: Applied Physics

Volumn 45, Issue 36, 2012, Pages

  Sankaran, K J ^a   Kurian, J ^b   Chen, H C ^b   Dong, C L ^c   Lee, C Y ^a   Tai, N H ^a   Lin, I N ^b  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b TAMKANG UNIVERSITY   (Taiwan)

^c NATIONAL SYNCHROTRON RADIATION RESEARCH CENTER   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ACICULAR STRUCTURES; DEPOSITION PROCESS; ELECTRON FIELD EMISSION; GRANULAR STRUCTURESS; GRAPHITIC PHASE; MICRO-STRUCTURAL; NANOWIRE STRUCTURES; NEAR-EDGE X-RAY ABSORPTION FINE STRUCTURE SPECTRUM; NEEDLE-LIKE; SUBSTRATE TEMPERATURE; ULTRANANOCRYSTALLINE DIAMOND FILMS; ULTRANANOCRYSTALLINE DIAMONDS;

DIAMONDS; GRAIN GROWTH; NANOWIRES; NEEDLES;

CONDUCTIVE FILMS;

EID: 84865981359     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/45/36/365303     Document Type: Article

References (83)

1. Corrigan T D, Gruen D M, Krauss A R, Zapol P and Chang R P H 2002 Diamond Relat. Mater. 11 43 (Pubitemid 34102735)
2. Ma K L, Tang J X, Zou Y S, Ye Q, Zhang W J and Lee S T 2007 Appl. Phys. Lett. 90 092105 (Pubitemid 46355707)
3. van der Weide J and Nemanich R J 1993 Appl. Phys. Lett. 62 1878
4. Babinec T M, Hausmann B M, Khan M, Zhang Y, Maze J, Hemmer P R and Lončar M 2010 Nature Nanotechnol. 5 195
5. Yang N, Uetsuka H, Osawa E and Nebel C E 2008 Nano Lett. 8 3572
6. Wei M, Terashima C, Lv M, Fujishima A and Gu Z Z 2009 Chem. Commun. 24 3624
7. Xiao X, Wang J, Carlisle J A, Mech B, Greenberg R, Freda R, Humayun M S, Weiland J and Auciello O 2006 J. Biomed. Mater. Res. B 77B 273 (Pubitemid 43667450)
8. Srinivasan S, Hiller J, Kabius B and Auciello O 2007 Appl. Phys. Lett. 90 134101 (Pubitemid 46516940)
9. Vavilov V S 1975 Phys. Status Solidi a 31 11
10. Okano K, Naruki H, Akiba Y, Kurosu T, Iida M and Hirose Y 1988 Japan. J. Appl. Phys. 27 173
11. Wurzinger P, Pongratz P, Hartmann P, Haubner R and Lux B 1997 Diamond Relat. Mater. 6 763
12. Ramamurti R, Becker M, Schuelke T, Grotjohn T A, Reinhard D K and Asmussen J 2009 Diamond Relat. Mater. 18 704
13. Dahlem F, Achatz P, Williams O A, Araujo D, Bustarret E and Courtois H 2010 Phys. Rev. B 82 033306
14. Šopík B and Lipavsk P 2012 Diamond Relat. Mater. 21 77
15. Saito T, Kameta M, Kusakabe K, Morooka S, Maeda H, Hayashi Y and Asano T 1998 Japan. J. Appl. Phys. 37 L543
16. Koizumi S, Teraji T and Kanda H 2000 Diamond Relat. Mater. 9 935
17. Kanda H, Watanabe K, Koizumia S and Teraji T 2003 Diamond Relat. Mater. 12 20 (Pubitemid 36300189)
18. Hu X J, Ye J S, Hu H, Chen X H and Shen Y G 2011 Appl. Phys. Lett. 99 131902
19. Wang L G and Zunger A 2002 Phys. Rev. B 66 161202
20. Sakaguchi I, Gamo M N, Kikuchi Y, Yasu E, Haneda H, Suzuki T and Ando T 1999 Phys. Rev. B 60 R2139
21. Petherbridge J R, May P W, Fuge G M, Robertson G F, Rosser K N and Ashfold M N R 2002 J. Appl. Phys. 91 3605 (Pubitemid 34256076)
22. Nakazawa K, Tachiki M, Kawarada H, Kawamura A, Horiuchi K and Ishikura T 2003 Appl. Phys. Lett. 82 2074
23. Koeck F A M and Nemanich R J 2006 Diamond Relat. Mater. 15 2006 (Pubitemid 44779227)
24. Morell G, Gonzalez-Berros A, Weiner B R and Gupta S 2006 J. Mater. Sci.: Mater. Electron. 17 443
25. Krauss A R et al 2001 Diamond Relat. Mater. 10 1952 (Pubitemid 33045071)
26. Zhou D, Krauss A R, Qin L C, McCauley T G, Gruen D M, Corrigan T D, Chan R P H and Gnaser H 1997 J. Appl. Phys. 82 4546
27. Birrell J, Gerbi J E, Auciello O, Gibson J M, Gruen D M and Carlisle J A 2003 J. Appl. Phys. 93 5606
28. Bhattacharyya S 2004 Phys. Rev. B 70 125412
29. Chen Y C, Tai N H and Lin I N 2008 Diamond Relat. Mater. 17 457 (Pubitemid 351608790)
30. Sankaran K J, Joseph P T, Tai N H and Lin I N 2010 Diamond Relat. Mater. 19 927
31. Lin C R, Liao W H, Wei D H, Tsai J S, Chang C K and Fang W C 2011 Diamond Relat. Mater. 20 380
32. Schreck M, Hormann F, Roll H J, Linder K N and Stitzker B 2001 Appl. Phys. Lett. 78 192 (Pubitemid 33661801)
33. Isberg J, Hammersberg J, Johnannson E, Wilkstrom T, Twitchen D J, Whitehead A J, Coe S E and Scarsbrook G A 2002 Science 297 1670 (Pubitemid 35000775)
34. Yoneda H, Ueda K, Aikawa Y, Baba K and Shohata N 1998 J. Appl. Phys. 83 1730
35. Shenderova O A, Brenner D W and Yang L H 1999 Phys. Rev. B 60 7043
36. Bohr S, Haubner R and Lux B 1996 Appl. Phys. Lett. 68 1075 (Pubitemid 126684091)
37. Tsang R S, Rego C A, May P W, Ashfold M N R and Rosser K N 1997 Diamond Relat. Mater. 6 247
38. Afzal A, Rego C A, Ahmed W and Cherry R I 1998 Diamond Relat. Mater. 7 1033
39. Shih C F, Liu K S and Lin I N 2000 Diamond Relat. Mater. 9 1591
40. Kshirsagar S T, Kshirsagar R B, Patil P S, Kulkarni A V, Mandale A B, Gaikwad A B and Gokhale S P 2005 Diamond Relat. Mater. 14 232 (Pubitemid 40146346)
41. Liu Y K, Tso P L, Pradhan D, Lin I N, Clark M and Tzeng Y 2005 Diamond Relat. Mater. 14 2059 (Pubitemid 41635572)
42. Joseph P T, Tai N H, Niu H, Palnitkar U A, Pong W F, Cheng H F and Lin I N 2008 Diamond Relat. Mater. 17 1812
43. Bhattacharyya S et al 2001 Appl. Phys. Lett. 79 1441
44. Birrell J, Carlisle J A, Auciello O, Gruen D M and Gibson J M 2002 Appl. Phys. Lett. 81 2235 (Pubitemid 35166482)
45. Subramanian K, Kang W P, Davidson J L and Hofmeister W H 2005 Diamond Relat. Mater. 14 404 (Pubitemid 40643124)
46. Ma K L, Zhang W J, Zou Y S, Chong Y M, Leung K M, Bello I and Lee S T 2006 Diamond Relat. Mater. 15 626 (Pubitemid 43929289)
47. Arenal R, Bruno P, Miller D J, Bleuel M, Lal J and Gruen D M 2007 Phys. Rev. B 75 195431
48. Sobia A R, Adnan S, Mukhtiar A, Khurrama A A, Turab A A, Awaisa A, Naveed A, Faisal Q J, Javaid H and Yu G J 2012 Curr. Appl. Phys. 12 712
49. Rakha S A, Yu G, Cao Ji, He S and Zhou X 2010 J. Appl. Phys. 107 114324
50. Teii K and Ikeda T 2007 Diamond Relat. Mater. 16 753 (Pubitemid 46552109)
51. Lin Y C, Sankaran K J, Chen Y C, Lee C Y, Chen H C, Lin I N and Tai N H 2011 Diamond Relat. Mater. 20 191
52. Shang N, Papakonstantinou P, Wang P, Zakharov A, Palnitkar U, Lin I N, Chu M and Stamboulis A 2009 ACS Nano 3 1032
53. Sun L, Gong J, Zu D, Zhu Z and He S 2004 Adv. Mater. 16 1849
54. Li Y, Kim W, Zhang Y, Rolandi M, Wang D and Dai H 2001 J. Phys. Chem. B 105 11424 (Pubitemid 35338441)
55. Singh J 1994 J. Mater. Sci. 29 2761
56. Fowler R H and Nordheim L 1928 Proc. R. Soc. Lond. A 119 173
57. Solin S A and Ramdas A K 1970 Phys. Rev. B 1 1687
58. Ager J W, Veirs D K and Rosenblatt G M 1991 Phys. Rev. B 43 6491
59. Mermoux M, Marcus B, Swain G M and Butler J E 2002 J. Phys. Chem. B 106 10816 (Pubitemid 35410220)
60. Butler J E and Sumant A V 2008 Chem. Vapor Depos. 14 145
61. Birrell J, Gerbi J E, Auciello O, Gibson J M, Johnson J and Carlisle J A 2005 Diamond Relat. Mater. 14 86
62. Xiao X, Birrell J, Gerbi J E, Auciello O and Carlisle J A 2004 J. Appl. Phys. 96 2232
63. Chen Q, Gruen D M, Krauss A R, Corrigan T D, Witek M and Swain G M 2001 J. Electrochem. Soc. 148 E44 (Pubitemid 32189327)
64. Yarbrough W A and Messier R 1990 Science 247 688
65. Nemanich R J, Glass J T, Lucovsky G and Shroder R E 1988 J. Vac. Sci. Technol. A 6 1783
66. Ferrari A C and Robertson J 2001 Phys. Rev. B 63 121405
67. Kuzmany H, Pfeiffer R, Salk N and Gunther B 2004 Carbon 42 911
68. Michaelson Sh and Hoffman A 2006 Diamond Relat. Mater. 15 486 (Pubitemid 43929276)
69. Gupta S, Weiner B R and Morell G 2003 Appl. Phys. Lett. 83 491
70. Joseph P T, Tai N H, Chen C H, Niu H, Cheng H F, Pong W F and Lin I N 2009 J. Phys. D: Appl. Phys. 42 105403
71. Coffman F L, Cao R, Pianetta P A, Kapoor S, Kelly M and Terminello L J 1996 Appl. Phys. Lett. 69 568
72. Lin C R, Liao W H, Wei D H, Chang C K, Fang W C, Chen C L, Dong C L, Chen J L and Guo J H 2011 J. Cryst. Growth 326 212
73. Wang C S, Tong G H, Chen H C, Shih W C and Lin I N 2010 Diamond Relat. Mater. 19 147
74. Wang C S, Chen H C, Cheng H F and Lin I N 2010 J. Appl. Phys. 107 034304
75. Sankaran K J, Chen H C, Lee C Y, Lin I N and Tai N H unpublished
76. Vlasov I I, Lebedev O I and Ralchenko V G 2007 Adv. Mater. 19 4058 (Pubitemid 350190464)
77. Cao G Z, Schermer J J, Enckevort W J P V, Elst W A L M and Giling L J 1996 J. Appl. Phys. 79 1357
78. van der Drift A 1967 Philips Res. Rep. 22 267
79. Buijnsters J G, Shankar P, van Enckevort W J P, Schermer J J and ter Meulen J J 2005 Thin Solid Films 474 186
80. Redfern P C, Horner D A, Curtiss L A and Gruen D M 1996 J. Phys. Chem. 100 11654
81. Sternbergt M, Zapol P, Frauenheimt T, Carlisle J A, Gruen D M and Curtiss L A 2001 MRS Proc. 675 W12
82. Kajihara S A, Antonelli A, Bernhol J and Car R 1991 Phys. Rev. Lett. 66 2010
83. Zapol P, Sternberg M, Curtiss L A, Frauenheim T and Gruen D M 2001 Phys. Rev. B 65 045403