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Volumn 7, Issue 7, 1998, Pages 1033-1038
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HFCVD diamond grown with added nitrogen: Film characterization and gas-phase composition studies
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Author keywords
Characterization; Hot filament CVD; Morphology; Nitrogen
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
CRYSTAL STRUCTURE;
HYDROGEN;
METHANE;
NITROGEN;
RAMAN SPECTROSCOPY;
X RAY DIFFRACTION ANALYSIS;
HOT FILAMENT CHEMICAL VAPOR DEPOSITION;
DIAMOND FILMS;
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EID: 0032117853
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/S0925-9635(98)00148-4 Document Type: Article |
Times cited : (56)
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References (27)
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