On the deposition rate in a high power pulsed magnetron sputtering discharge

Applied Physics Letters

Volumn 89, Issue 15, 2006, Pages

  Alami, J ^a   Sarakinos, K ^a   Mark, G ^b   Wuttig, M ^a  

^a RWTH AACHEN UNIVERSITY   (Germany)

^b Melec GmbH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DC MAGNETRON SPUTTERING (DCMS); DEPOSITION RATES; OPTICAL EMISSION SPECTROSCOPY; POWER PULSED MAGNETRON SPUTTERING (HPPMS);

CHROMIUM; CURRENT DENSITY; DEPOSITION; ELECTRIC CURRENTS; EMISSION SPECTROSCOPY;

MAGNETRON SPUTTERING;

EID: 33750082095     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2362575     Document Type: Article

References (15)

1. V. Kouznetsov, K. Macák, J. M. Schneider, U. Helmersson, and I. Petrov, Surf. Coat. Technol. 122, 290 (1999).
2. J. Alami, P. O. Å. Persson, J. Böhlmark, J. T. Gudmundsson, D. Music, and U. Helmersson, J. Vac. Sci. Technol. A 23, 278 (2005).
3. A. P. Ehiasarian, R. New, W.-D. Münz, L. Hultman, U. Helmersson, and V. Kouznetsov, Vacuum 65, 147 (2002).
4. S. Konstantinidis, A. Ricad, M. Ganciu, J. P. Dauchot, C. Ranea, and M. Hecq, J. Appl. Phys. 95, 2900 (2004).
5. W. D. Sproul, D. J. Christie, and D. C. Carter, 47th Annual Technical Conference Proceedings, Society of Vacuum Coaters (2004), p. 96.
6. S. Konstantinidis, J. P. Dauchot, M. Ganciu, and M. Hecq, Appl. Phys. Lett. 88, 021502 (2006).
7. J. Alami, P. Eklund, J. Emmerlich, O. Wilhelmsson, U. Jansson, H. Högberg, L. Hultman, and U. Helmersson, Thin Solid Films (to be published).
8. D. J. Christie, J. Vac. Sci. Technol. A 23, 330 (2005).
9. U. Helmersson, M. Lattemann, J. Bohlmark, A. P. Ehiasarian, and J. T. Gudmundsson, Thin Solid Films 513, 1 (2006).
10. J. T. Gudmundsson, J. Alami, and U. Helmersson, Appl. Phys. Lett. 78, 3427 (2001).
11. MELEC GmbH, U.S. Patent No. 6,735,099 B2 (17 April 2001).
12. H. Weis, T. Müggenburg, P. Grosse, L. Herlitze, I. Friedrich, and M. Wuttig, Thin Solid Films 351, 184 (1999).
13. Handbook of Chemistry and Physics (CRC, Boca Raton, FL, 1988), 69th ed., pp. E212-E228.
14. S. M. Rossnagel, and H. R. Kaufman, J. Vac. Sci. Technol. A 6, 223 (1988).
15. M. Lattemann, A. P. Ehiasarian, J. Bohlmark, P. Å. O. Persson, and U. Helmersson, Surf. Coat. Technol. 200, 6495 (2006).