Analysis of resonance frequency and pull-in voltages of curled micro-bimorph cantilevers

Journal of Micromechanics and Microengineering

Volumn 22, Issue 3, 2012, Pages

  Abdulla, S M C ^a   Yagubizade, H ^a   Krijnen, G J M ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODE LAYERS; EXPERIMENTAL DATA; METAL ELECTRODE LAYERS; NANOMETRES; PULL-IN VOLTAGE; RESONANCE FREQUENCIES; SOFTENING EFFECT; STATIC MODEL; STRESS-INDUCED; SYSTEMATIC STUDY;

ELECTROSTATIC ACTUATORS; NANOCANTILEVERS;

NATURAL FREQUENCIES;

EID: 84857964265     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/22/3/035014     Document Type: Article

References (43)

1. Schweizer S et al 1999 Thermally actuated optical microscanner with large angle and low consumption Sensors Actuators A 76 4707 (Pubitemid 30543202)
2. Zhang Y et al 1999 Thermally actuated microprobes for a new wafer probe card IEEE J. Microelectromech. Syst. 8 439
3. Yasuda T et al 1995 Electrostatically driven micro elastic joints Proc. IEEE/RSJ Int. Conf. on Intelligent Robots and Systems (Pittsburgh, PA) pp 2425
4. Greitmann G and Buser R A 1996 Tactile microgripper for automated handling of microparts Sensors Actuators A 53 4105 (Pubitemid 126359576)
5. Akiyama T et al 2000 Integrated atomic force microscopy array probe with metaloxidesemiconductor field effect transistor stress sensor, thermal bimorph actuator, and on-chip complementary metaloxidesemiconductor electronics J. Vac. Sci. Technol. B 18 266975 (Pubitemid 32088088)
6. Logeeswaran V et al 2006 Self-assembled microfabrication technology for 3D isotropic negative index material Proc. SPIE 6393 639305
7. Babaei J H et al 1997 Integrable active microvalve with surface micromachined curled-up actuator Proc. 9th Int. Conf. on Solid-State Sensors Actuators (Chicago) pp 8336
8. Miller D C et al 2000 Microrelay packaging technology using flipchip assembly Proc. IEEE MEMS pp 26570
9. Lee C Y and Lee G B 2003 Micromachine-based humidity sensors with integrated temperature sensors for signal drift compensation J. Micromech. Microeng. 13 6207
10. Fang W et al 1999 Determining thermal expansion coefficients of thin films using micromachined cantilevers Sensors Actuators A 77 217 (Pubitemid 30503510)
11. Min Y H and Kim Y K 2000 In situ measurement of residual stress in micromachined thin films using a specimen with composite-layered cantilevers J. Micromech. Microeng. 10 31421
12. Senturia S D 2001 Energy-conserving transducers Microsystem Design (Boston, MA: Kluwer) chapter 6
13. Chen R T et al 1999 A low voltage micromachined optical switch by stress-induced bending Proc. of 12th IEEE MEMS pp 4248
14. Chang C and Chang P 2000 Innovative micromachined microwave switch with very low insertion loss Sensors Actuators A 715 (Pubitemid 32212754)
15. Abdulla S M C et al 2011 Tuning a racetrack ring resonator by an integrated dielectric MEMS cantilever Opt. Express 19 1586478
16. Kauppinen L J et al 2011 Micromechanically tuned ring resonator in silicon on insulator Opt. Lett. 36 10479
17. Abdulla S M C et al 2011 Monolithically integrated cantilevers with self-aligned tips for wavelength tuning in a photonic crystal cavity-based channel-drop filter J. Micromech. Microeng. 21 074004
18. Abdulla S M C et al 2011 Micro-cantilever integrated 2D photonic crystal slab waveguide for enhanced dispersion tuning J. Micromech. Microeng. 21 125010
19. Cheng J et al 2004 Analytical and finite element model pull-in study of rigid and deformable electrostatic microactuators J. Micromech. Microeng. 14 5768
20. Saha S C et al 2008 Modelling of spring constant and pull-down voltage of non-uniform RF MEMS cantilever incorporating stress gradient Sensors Transducers 98 5468
21. Gupta R K 1997 Electrostatic pull-in test structure design for in-situ mechanical property measurements of microelectromechanical systems PhD Thesis Massachusetts Institute of Technology
22. Ou K S et al 2011 A novel semianalytical approach for finding pull-in voltages of micro cantilever beams subjected to electrostatic loads and residual stress gradients J. Microelectromech. Syst. 20 52737
23. Wei L C et al 2002 Analytical modeling for determination of pull-in voltage for an electrostatic actuated MEMS cantilever beam Proc. IEEE Int. Conf. on Semiconductor Electronics (Penang, Malaysia) pp 2338
24. Hu Y C and Wei C S 2007 An analytical model considering the fringing fields for calculating the pull-in voltage of microcurled cantilever beams J. Micromech. Microeng. 17 6167
25. Chuang W C et al 2009 Electromechanical behavior of the curled cantilever beam J. Micro/Nanolith. MEMS MOEMS 8 033020
26. Soma A and Ballestra A 2009 Residual stress measurement method in MEMS microbeams using frequency shift data J. Micromech. Microeng. 19 095023
27. Bobylev N A et al 1994 Convergence of numerical procedures (Approximation Procedures in Nonlinear Oscillation Theory) (Berlin: Walter de Gruyter & Co) chapter 3
28. Tilmans H A C and Legtenberg R 1994 Electrostatically driven vacuum-encapsulated polysilicon resonators Part II. Theory and performance Sensors Actuators A 45 6784
29. Iwamoto S et al 2006 Observation of micromechanically controlled tuning of photonic crystal line-defect waveguide Appl. Phys. Lett. 88 011104
30. Gere J M 2006 Mechanics of Materials (Toronto, Canada: Thomson)
31. Elwenspoek M and Wiegerink R 2001 Mechanical Microsensors (Berlin: Springer)
32. Genta G 2009 Vibration of beams Vibration Dynamics and Control (New York: Springer) chapter 12
33. Volterra E and Zachmanoglou E C 1965 Dynamics of Vibrations (Columbus, OH: Charles E Merrill Books, Inc.)
34. Younis M I et al 2010 Nonlinear dynamics of MEMS arches under harmonic electrostatic actuation J. Microelectromech. Syst. 19 64756
35. Ouakada H M and Younis M I 2010 The dynamic behavior of MEMS arch resonators actuated electrically Int. J. Non-Linear Mech. 45 70413
36. Krylov S et al 2008 The pull-in behavior of electrostatically actuated bistable microstructures J. Micromech. Microeng. 18 055026
37. Chowdhury S et al 2005 A closed-form model for the pull-in voltage of electrostatically actuated cantilever beams J. Micromech. Microeng. 15 75663 (Pubitemid 40541001)
38. Rezazadeh G et al 2006 Application of piezoelectric layers in electrostatic MEM actuators: controlling of pull-in voltage Microsyst. Technol. 12 116370 (Pubitemid 44407110)
39. Rezazadeh G et al 2009 Dynamic characteristics and forced response of an electrostatically-actuated microbeam subjected to fluid loading Microsyst. Technol. 15 135563
40. Gardeniers J G E et al 1996 LPCVD silicon-rich silicon nitride films for applications in micromechanics, studied with statistical experimental design J. Vac. Sci. Technol. A 14 287992
41. Legtenberg R and Tilmans H A C 1994 Electrostatically driven vacuum-encapsulated polysilicon resonators: part I. Design and fabrication Sensors Actuators A 45 5766
42. Gavan K B et al 2009 Effect of undercut on the resonant behaviour of silicon nitride cantilevers J. Micromech. Microeng. 19 035003
43. Chuang W C et al 2010 Review on the modeling of electrostatic MEMS Sensors 10 614971