Micromachine-based humidity sensors with integrated temperature sensors for signal drift compensation

Journal of Micromechanics and Microengineering

Volumn 13, Issue 5, 2003, Pages 620-627

  Lee, Chia Yen ^a   Lee, Gwo Bin ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC HUMIDITY; ATMOSPHERIC TEMPERATURE; ELECTRODES; MICROELECTROMECHANICAL DEVICES; MICROELECTRONIC PROCESSING; NITRIDES; PLATINUM; RESISTORS; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SPURIOUS SIGNAL NOISE; THIN FILM DEVICES;

GLASS SUBSTRATE; HUMIDITY SENSORS; SIGNAL DRIFT COMPENSATION; TEMPERATURE SENSORS; THIN FILM PLATINUM RESISTORS;

MICROSENSORS;

EID: 0141830175     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/13/5/313     Document Type: Article

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