Determining thermal expansion coefficients of thin films using micromachined cantilevers

Sensors and Actuators, A: Physical

Volumn 77, Issue 1, 1999, Pages 21-27

  Fang, Weileun ^a   Tsai, Hsin Chung ^a   Lo, Chun Yen ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SUBSTRATES; THERMAL EFFECTS; THERMAL EXPANSION; THIN FILMS;

MICROCANTILEVERS;

MICROACTUATORS;

EID: 0033362640     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00019-9     Document Type: Article

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