Self-assembled microfabrication technology for 3D isotropic negative index material

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6393, Issue , 2006, Pages

  Logeeswaran, V J ^a   Saif Islam, M ^a   Chan, Mei Lin ^a   Horsley, David A ^a   Wu, Wei ^b   Wang, Shih Yuan ^b  

^a University of California Davis   (United States)

^b HEWLETT PACKARD LABORATORIES   (United States)

Author keywords

3D microfabrication; bi layer hinge; Metamaterial; Negative Index Materials (NIM); Self assembly

Indexed keywords

3D-MICROFABRICATION; BI-LAYER HINGES; METAMATERIALS; NEGATIVE-INDEX-MATERIALS (NIM);

ARRAYS; CHROMIUM; DEPOSITION; DOPING (ADDITIVES); ELECTRON BEAMS; NANOSTRUCTURED MATERIALS; RESIDUAL STRESSES; SEMICONDUCTING SILICON;

SELF ASSEMBLY;

EID: 33751281918     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.687140     Document Type: Conference Paper

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