Residual stress measurement method in MEMS microbeams using frequency shift data

Journal of Micromechanics and Microengineering

Volumn 19, Issue 9, 2009, Pages

  Somá, Aurelio ^a   Ballestra, Alberto ^a  

^a POLITECNICO DI TORINO   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ANALYTICAL AND NUMERICAL MODELS; DC VOLTAGE; DYNAMICAL BEHAVIOURS; EXPERIMENTAL FREQUENCIES; FABRICATION PROCESS; FINITE ELEMENT MODELS; FREQUENCY SHIFT; GEOMETRICAL CONFIGURATIONS; INITIAL CURVATURE; MICRO BEAMS; MICRO-CANTILEVERS; NUMERICAL MODELS; OUT-OF-PLANE; PULL-IN VOLTAGE; RESIDUAL STRAINS; RESIDUAL STRESS EFFECTS; STATIC DEFLECTIONS;

CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; FREQUENCY SHIFT KEYING; NUMERICAL METHODS;

RESIDUAL STRESSES;

EID: 70350645197     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/9/095023     Document Type: Article

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