Tuning a racetrack ring resonator by an integrated dielectric MEMS cantilever

Optics Express

Volumn 19, Issue 17, 2011, Pages 15864-15878

  Abdulla, S M C ^a   Kauppinen, L J ^a   Dijkstra, M ^a   De Boer, M J ^a   Berenschot, E ^a   Jansen, H V ^a   De Ridder, R M ^a   Krijnen, G J M ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC COILS; ELECTROSTATIC ACTUATORS; INTEGRATION; MICROMACHINING; OPTICAL RESONATORS; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; TUNING;

ELECTROSTATIC ACTUATION; EVANESCENT FIELDS; INTEGRATED DEVICE; MICROMACHINING TECHNIQUES; OPTICAL QUALITY FACTOR; PROPAGATION PROPERTIES; RESONANCE WAVELENGTHS; RING RESONATOR; RING WAVEGUIDES; SILICON ON INSULATOR WAFERS;

NANOCANTILEVERS;

EID: 80051729861     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.19.015864     Document Type: Article

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