Effect of undercut on the resonant behaviour of silicon nitride cantilevers

Journal of Micromechanics and Microengineering

Volumn 19, Issue 3, 2009, Pages

  Babaei Gavan, K ^a   Van Der Drift, E W J M ^a   Venstra, W J ^a   Zuiddam, M R ^a   Van Der Zant, H S J ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; RESONANCE; SILICON NITRIDE;

DYNAMIC PROPERTIES; EFFECTIVE LENGTHS; FINITE ELEMENT MODELLING; MODE NUMBERS; MODE SHAPES; OPTICAL DEFLECTIONS; RESONANCE FREQUENCIES; RESONANCE MODES; SIMPLE MODELS; STEPPED BEAMS; SYSTEMATIC INVESTIGATIONS;

NANOCANTILEVERS;

EID: 61849154080     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/3/035003     Document Type: Article

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