Micro-cantilever integrated 2D photonic crystal slab waveguide for enhanced dispersion tuning

Journal of Micromechanics and Microengineering

Volumn 21, Issue 12, 2011, Pages

  Abdulla, S M C ^a   Kauppinen, L J ^a   Dijkstra, M ^a   De Boer, M J ^a   Berenschot, E ^a   De Ridder, R M ^a   Krijnen, G J M ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

2-D PHOTONIC CRYSTALS; BIMORPH CANTILEVER; DISPERSION TUNING; DRIVE SIGNAL; FABRICATION TECHNOLOGIES; INTEGRATED DEVICE; MICRO-CANTILEVERS; MICROMACHINING TECHNIQUES; PROPAGATION PROPERTIES; SELF-ALIGNED; SQUARE-WAVE;

ELECTROSTATIC ACTUATORS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; NANOCANTILEVERS; PHOTONIC CRYSTALS; TWO DIMENSIONAL; WAVEGUIDES;

PHOTONIC DEVICES;

EID: 84855432015     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/12/125010     Document Type: Article

References (30)

1. Yablonovitch E 1987 Inhibited spontaneous emission in solid-state physics and electronics Phys. Rev. Lett. 58 2059-62
2. Chong H M H and DeLaRue R M 2004 Tuning of photonic crystal waveguide microcavity by thermooptic effect IEEE Photon. Technol. Lett. 16 1528-30
3. Schmidt M et al 2005 Electro-optically tunable photonic crystals Appl. Phys. Lett. 87 121110-1-3
4. Mingaleev S F et al 2004 Tunable photonic crystal circuits: concepts and designs based on single-pore infiltration Opt. Lett. 29 2858-60 (Pubitemid 40011249)
5. Park W and Lee J B 2004 Mechanically tunable photonic crystal structure Appl. Phys. Lett. 85 4845-7 (Pubitemid 40715148)
6. Iwamoto S et al 2006 Observation of micromechanically controlled tuning of photonic crystal line-defect waveguide Appl. Phys. Lett. 88 011104-1-3
7. Abdulla S M C et al 2011 Monolithically integrated cantilevers with self-aligned tips for wavelength tuning in a photonic crystal cavity-based channel-drop filter J. Micromech. Microeng. 21 0740041-6
8. Kauppinen L J et al 2011 Micromechanically tuned ring resonator in silicon on insulator Opt. Lett. 36 1047-9
9. Abdulla S M C, Kauppinen L J, Dijkstra M, de Boer M J, Berenschot E, Jansen H V, de Riddler R M and Krijnen G J M 2011 Tuning a racetrack ring resonator by an integrated dielectric MEMS cantilever Opt. Express 19 15864-78
10. Hopman W C L, van der Werf K O, Hollink A J F, Bogaerts W, Subramaniam V and de Ridder R M 2006 Nano-mechanical tuning and imaging of a photonic crystal micro-cavity resonance Opt. Exp. 14 8745-52 (Pubitemid 44435086)
11. Takahata T et al 2006 Transmittance tuning of photonic crystal reflectors using an AFM cantilever Sensors Actuators A 128 197-201
12. Kanamori Y et al 2003 Photonic crystal switch by inserting nano-crystal defects using MEMS actuator IEEE/LEOS Int. Conf. Optical MEMS (Piscataway, NJ, 2003) pp 107-8
13. Zhou W et al 2006 Novel reconfigurable semiconductor photonic crystal-MEMS device Solid-State Electron. 50 908-13 (Pubitemid 44015832)
14. Takahata T et al 2010 A wide wavelength range optical switch using a flexible photonic crystal waveguide and silicon rods J. Micromech. Microeng. 20 075009-1-6
15. Johnson S G and Joannopoulos J D 2001 Block-iterative frequency-domain methods for Maxwell's equations in a planewave basis Opt. Express 8 173-90
16. Ferreira L G and Pudensi M A A 1981 Waveguiding in a dielectric medium varying slowly in one transverse direction J. Opt. Soc. Am. 71 1377-80
17. Ivanova O V et al 2009 Variational effective index method for 3D vectorial scattering problems in photonics: TE polarization Proc. PIERS (Moscow, 2009) pp 1038-42
18. Dumon P et al 2009 Towards foundry approach for silicon photonics: silicon photonics platform ePIXfab Electron. Lett. 45 581-2
19. Gardeniers J G E et al 1996 LPCVD silicon-rich silicon nitride films for applications in micromechanics, studied with statistical experimental design J. Vac. Sci. Technol. A 14 2879-92
20. Legtenberg R and Tilmans H A C 1994 Electrostatically driven vacuum-encapsulated polysilicon resonators: part I. Design and fabrication Sensors Actuators A 45 57-66
21. Abdulla S M C 2011 Stringer elimination methods in surface micro and nano machining, in preparation
22. Kauppinen L J et al 2010 Photonic crystal cavity-based Y splitter for mechano-optical switching IEEE Photon. Technol. Lett. 22 966-8
23. Sarajlic E et al 2005 Fabrication of 3D nanowire frames by conventional micromachining technology Proc. 13th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Seoul, Korea, 2005) pp 27-30 (Pubitemid 41538422)
24. Berenschot E et al 2008 3D-nanomachining using corner lithography IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems (Sanya, China, 2008) pp 729-32
25. Kolasinski K W 2003 The mechanism of Si etching in fluoride solutions Phys. Chem. Chem. Phys. 5 1270-8
26. Taillaert D et al 2006 Grating couplers for coupling between optical fibers and nanophotonic waveguides Japan Soc. Appl. Phys. 45 6071-7 (Pubitemid 44366829)
27. Kauppinen L J 2010 Compact integrated optical devices for optical sensor and switching applications PhD Thesis, University of Twente
28. Abdulla S M C, Kauppinen L J, Dijkstra M A, Berenschot E, de Boer M J, de Ridder R M and Krijnen G J M 2011 Mechano-optical switching in a MEMS integrated photonic crystal slab waveguide 24th IEEE Int. Conf. on Micro Electro Mechanical System (MEMS 2011) (23-27 January 2011, Cancun, Mexico)
29. Abdulla S M C, Kauppinen L J, Dijkstra M, de Boer M J, Berenschot E, de Ridder R M and Krijnen G J M 2010 Fabrication of integrated bimorphs with self aligned tips for optical switching in 2-D photonic crystal waveguides 21st Micromechanics and Micro Systems Europe Workshop (MME 2010) (September 26-29, 2010, Enschede, The Netherlands)
30. Abdulla S M C 2011 Integration of micro-cantilevers with photonic structure for mechano-optical wavelength selective devices, PhD Thesis, University of Twente