Monolithically integrated cantilevers with self-aligned tips for wavelength tuning in a photonic crystal cavity-based channel-drop filter

Journal of Micromechanics and Microengineering

Volumn 21, Issue 7, 2011, Pages

  Abdulla, S M C ^a   Kauppinen, L J ^a   Dijkstra, M ^a   De Boer, M J ^a   Berenschot, E ^a   De Ridder, R M ^a   Krijnen, G J M ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

2-D PHOTONIC CRYSTALS; ALL-OPTICAL DEVICE; BAND EDGE; CHANNEL-DROP FILTERS; CMOS COMPATIBLE; DC VOLTAGE; ELECTROSTATIC ACTUATION; HOLE DIAMETER; INTEGRATED DEVICE; MONOLITHICALLY INTEGRATED; SACRIFICIAL LAYER; SELF-ALIGNED; TELECOMMUNICATION WAVELENGTHS; WAVELENGTH SHIFT; WAVELENGTH TUNING;

DROPS; ELECTROSTATIC ACTUATORS; INTEGRATION; MONOLITHIC INTEGRATED CIRCUITS; NANOCANTILEVERS; TELECOMMUNICATION EQUIPMENT;

PHOTONIC CRYSTALS;

EID: 79960071839     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/7/074004     Document Type: Article

References (28)

1. Yablonovitch E 1987 Inhibited spontaneous emission in solid-state physics and electronics Phys. Rev. Lett. 58 2059-62
2. Painter O J et al 1999 Room temperature photonic crystal defect lasers at near-infrared wavelengths in InGaAsP J. Light. Technol. 17 2082-8 (Pubitemid 30518951)
3. Teo S H G et al 2006 Induced free carrier modulation of photonic crystal optical intersection via localized optical absorption effect Appl. Phys. Lett. 89 091910
4. Skivesen N et al 2007 Photonic-crystal waveguide biosensor Opt. Express 15 3169-76 (Pubitemid 46457180)
5. Fan S et al 1998 Channel drop filters in photonic crystals Opt. Express 3 4-11
6. Chong H M H and DeLaRue R M 2004 Tuning of photonic crystal waveguide microcavity by thermo-optic effect IEEE Photon. Technol. Lett. 16 1528-30
7. Cui Y et al 2010 Silicon-based thermo-optically tunable photonic crystal lens IEEE Photon. Technol. Lett. 22 21-3
8. Fushman I et al 2007 Ultrafast nonlinear optical tuning of photonic crystal cavities Appl. Phys. Lett. 90 091118
9. Wang B et al 2010 Controlling mode degeneracy in a photonic crystal nanocavity with infiltrated liquid crystal Opt. Lett. 35 2603-5
10. Cui Y et al 2010 Mechanically tunable negative-index photonic crystal lens IEEE Photon. J. 2 1003-12
11. Märki I et al 2006 Tuning the resonance of a photonic crystal microcavity with an AFM probe Opt. Express 14 2969-78
12. Takahata T et al 2006 Transmittance tuning of photonic crystal reflectors using an AFM cantilever Sensors Actuators A 128 197-201
13. Hopman W C L et al 2006 Nano-mechanical tuning and imaging of a photonic crystal micro-cavity resonance Opt. Express 14 8745-52 (Pubitemid 44435086)
14. Koenderink A F et al 2005 Controlling the resonance of a photonic crystal microcavity by a near-field probe Phys. Rev. Lett. 95 153904
15. Intonti F et al 2008 Spectral tuning and near-field imaging of photonic crystal microcavities Phys. Rev. B 78 041401
16. Mujumdar S 2010 Tunability parameters in SNOM tip mediated tuning of an ultra-high quality heterostructure resonator J. Opt. 12 035001
17. Lalouat L et al 2007 Near-field interactions between a subwavelength tip and a small-volume photonic-crystal nanocavity Phys. Rev. B 76 041102
18. Chew X et al 2010 Dynamic tuning of an optical resonator through MEMS-driven coupled photonic crystal nanocavities Opt. Lett. 35 2517-9
19. Chew X et al 2010 An in-plane nano-mechanics approach to achieve reversible resonance control of photonic crystal nanocavities Opt. Express 18 22232-44
20. Dumon P et al 2009 Towards foundry approach for silicon photonics: silicon photonics platform ePIXfab Electron. Lett. 45 581-2
21. Kauppinen L J 2010 Compact integrated optical devices for optical sensor and switching applications PhD Thesis University of Twente
22. Selvaraja S K et al 2009 Fabrication of photonic wire and crystal circuits in silicon-on-insulator using 193 nm optical lithography J. Light. Technol. 27 4076-83
23. Gardeniers J G E et al 1996 LPCVD silicon-rich silicon nitride films for applications in micromechanics, studied with statistical experimental design J. Vac. Sci. Technol. A 14 2879-92
24. Legtenberg R and Tilmans H A C 1994 Electrostatically driven vacuum-encapsulated polysilicon resonators: part I. Design and fabrication Sensors Actuators A 45 57-66
25. Kolasinski K W 2003 The mechanism of Si etching in fluoride solutions Phys. Chem. Chem. Phys. 5 1270-8
26. Abdulla S M C et al 2009 Optimisation study of micro cantilevers for switching of photonic band gap crystals Int. Conf. on Photonics in Switching (Pisa, Italy, 2009) pp 1-2
27. Abdulla S M C et al Analysis of resonance frequency and pull-in voltages of curled micro-bimorph cantilevers TST Group, University of Twente, Enschede, The Netherlands (in preparation)
28. Taillaert D et al 2006 Grating couplers for coupling between optical fibers and nanophotonic waveguides Japan Soc. Appl. Phys. 45 6071-7 (Pubitemid 44366829)