Micromechanically tuned ring resonator in silicon on insulator

Optics Letters

Volumn 36, Issue 7, 2011, Pages 1047-1049

  Kauppinen, Lasse J ^a   Abdulla, Shahina M C ^a   Dijkstra, Meindert ^a   De Boer, Meint J ^a   Berenschot, Erwin ^a   Krijnen, Gijs J M ^a   Pollnau, Markus ^a   De Ridder, René M ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

EVANESCENT FIELDS; MICRO-CANTILEVERS; MONOLITHICALLY INTEGRATED; RESONANCE WAVELENGTHS; RING RESONATOR; SILICON ON INSULATOR; SILICON RING RESONATOR;

ELECTROSTATIC ACTUATORS; MONOLITHIC INTEGRATED CIRCUITS; OPTICAL INSTRUMENTS; RESONANCE; SILICON NITRIDE;

OPTICAL RESONATORS;

EID: 79956119731     PISSN: 01469592     EISSN: 15394794     Source Type: Journal    
DOI: 10.1364/OL.36.001047     Document Type: Article

References (10)

1. P. Dong, S. Liao, H. Liang, W. Qian, X. Wang, R. Shafiiha, D. Feng, G. Li, Z. Zheng, A. V. Krishnamoorthy, and M. Asghari, Opt. Lett. 35, 3246 (2010).
2. P. T. Rakich, M. A. Popović, M. R. Watts, T. Barwicz, H. I. Smith, and E. P. Ippen, Opt. Lett. 31, 1241 (2006).
3. I. Märki, M. Salt, and H. P. Herzig, Opt. Express 14, 2969 (2006).
4. W. C. L. Hopman, K. O. van der Werf, A. J. F. Hollink, W. Bogaerts, V. Subramaniam, and R. M. de Ridder, Opt. Express 14, 8745 (2006).
5. G. N. Nielson, D. Seneviratne, F. Lopez-Royo, P. T. Rakich, Y. Avrahami, M. R. Watts, H. A. Haus, H. L. Tuller, and G. Barbastathis, IEEE Photon. Technol. Lett. 17, 1190 (2005).
6. OlympIOs Integrated Optics Software, C2V, P.O. Box 318, 7500 AH Enschede, The Netherlands (http://www.c2v.nl/products/software/support/support.shtml).
7. Silicon photonics platform ePIXfab, Interuniversity Microelectronics Centre (IMEC), Leuven, Belgium (http://www.epixfab.eu/).
8. S. M. C. Abdulla, L. J. Kauppinen, M. Dijkstra, M. J. de Boer, E. Berenschot, H. V. Jansen, R. M. de Ridder, and G. J. M. Krijnen, MESA+ Research Institute for Nanotechnology, University of Twente, 7500 AE Enschede, The Netherlands, are preparing a manuscript to be called "Tuning a racetrack ring resonator by an integrated dielectric MEMS cantilever."
9. D. Taillaert, F. van Laere, M. Ayre, W. Bogaerts, D. van Thourhout, P. Bienstman, and R. Baets, Jpn. J. Appl. Phys. 45, 6071 (2006).
10. S. Senturia, Microsystem Design (Kluwer, 2001).