Nonlinear dynamics of MEMS arches under harmonic electrostatic actuation

Journal of Microelectromechanical Systems

Volumn 19, Issue 3, 2010, Pages 647-656

  Younis, Mohammad I ^a   Ouakad, Hassen M ^a   Alsaleem, Fadi M ^b   Miles, Ronald ^a   Cui, Weili ^a  

^a State University of New York   (United States)

^b Microstaq Inc   (United States)

Author keywords

Arches; Dynamic pull in; Dynamic snap through; Electrostatic actuation; Microelectromechanical systems (MEMS)

Indexed keywords

ELECTROSTATIC ACTUATION; MICROELECTROMECHANICAL SYSTEMS; PULL-IN; SNAP-THROUGH;

ARCHES; BANDPASS FILTERS; COMPOSITE MICROMECHANICS; DAMPING; DYNAMICS; ELECTROSTATIC ACTUATORS; ELECTROSTATICS; GALERKIN METHODS; HARMONIC ANALYSIS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; POLYSILICON;

DYNAMIC RESPONSE;

EID: 77953120154     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2010.2046624     Document Type: Article

References (40)

1. J. Qui, J. H. Lang, and A. H. A. Slocum, "Curved-beam bistable mechanism," J. Microelectromech. Syst., vol.13, no.2, pp. 137-146, Apr. 2004.
2. J. S. Go, Y. Cho, B. M. Kwak, and P. Kwanhum, "Snapping microswitch with adjustable acceleration threshold," Sens. Actuators A, Phys., vol.54, no.1-3, pp. 579-583, Jun. 1996.
3. J. Rossiter, B. Stoimenov, and T. Mukai, "A self-switching bistable artificial muscle actuator," in Proc. SICE-ICASE Int. Joint Conf., Busan, Korea, Oct. 2006, pp. 18-21.
4. R. A. M. Receveur, C. R. Marxer, R. Woering, V. C. M. H. Larik, and N. F. de Rooij, "Laterally moving bistable MEMS DC switch for biomed-ical applications," J. Microelectromech. Syst., vol.14, no.5, pp. 89-98, Oct. 2005.
5. B. Charlot, W. Sun, K. Yamashita, H. Fujita, and H. Toshiyoshi, "Bistable nanowire for micromechanical memory," J. Micromech. Micro-eng., vol.18, no.4, p. 045 005, Feb. 2008, 1088/0960-1317.
6. J. S. Han, J. S. Ko, Y. T. Kim, and B. M. Kwak, "Parametric study and optimization of a micro-optical switch with a laterally driven electromagnetic microactuator," J. Micromech. Microeng., vol.12, no.6, pp. 39-47, Oct. 2002.
7. J. S. Ko, M. G. Lee, J. S. Han, J. S. Go, B. Shin, and D.-S. Lee, "A laterally-driven bistable electromagnetic microrelay," ETRI J., vol.28, no.3, pp. 389-392, 2006.
8. S. Park and D. Hah, "Pre-shaped buckled-beam actuators: Theory and experiment," Sens. Actuators A, Phys., vol.148, no.1, pp. 186-192, Nov. 2008.
9. A. Michael and C. Y. Kwok, "Design criteria for bi-stable behavior in a buckled multi-layered MEMS bridge," J. Micromech. Microeng., vol.16, no.10, pp. 34-43, Aug. 2006.
10. J. Qui, J. H. Lang, A. H. Slocum, and A. C. Weber, "A bulk-micromachined bistable relay with U-shaped thermal actuators," J. Microelectromech. Syst., vol.14, no.5, pp. 99-109, Oct. 2005.
11. M. T. A. Saif, "On a tunable bistable MEMS-theory and experiment," J. Microelectromech. Syst., vol.9, no.2, pp. 157-170, Jun. 2000.
12. M. Sulfridge, T. Saif, N. Miller, and M. Meinhart, "Nonlinear dynamic study of a bistable MEMS: Model and experiment," J. Microelectromech. Syst., vol.13, no.5, pp. 725-731, Oct. 2004.
13. J. C. Terre, A. F. Marques, and A. M. Shkel, "Snap-action bistable micro-mechanics actuated by nonlinear resonance," J. Microelectromech. Syst., vol.17, no.5, pp. 1082-1093, Oct. 2008.
14. Y. Zhang, Y. Wang, Z. Li, Y. Huang, and D. Li, "Snap-through and pull-in instabilities of an arch-shaped beam under an electrostatic loading," J. Microelectromech. Syst., vol.16, no.3, pp. 684-693, Jun. 2007.
15. S. Krylov, B. R. Ilic, D. Schreiber, S. Seretensky, and H. Craighead, "The pull-in behavior of electrostatically actuated bistable microstructures," J. Micromech. Microeng., vol.18, no.5, pp. 055 026-1-055 026-20, Apr. 2008.
16. S. Krylov and S. Seretensky, "Pull-in and multistability analysis of an initially curved beam," presented at the Asia-Pacific Conf. Transducers Micro-Nano Technology, Singapore, Jun. 25-28, 2006, Paper D-27.
17. S. Krylov and N. Dick, "Pull-in dynamics of electrostatically actuated bistable micro beam," presented at the ASME Int. Design Engineering Technical Conf. Computers Information Engineering Conf., San Diego, CA, Aug. 30-Sep. 2, 2009, Paper DETC2009-87236.
18. K. Das and R. C. Batra, "Pull-in and snap-through instabilities in transient deformations of microelectromechanical systems," J. Micromech. Micro-eng., vol.19, no.3, pp. 035 008-1-035 008-19, Feb. 2009.
19. H. Li and B. Balachandran, "Buckling and free oscillations of composite microresonators," J. Microelectromech. Syst., vol.15, no.1, pp. 42-51, Feb. 2006. (Pubitemid 43210790)
20. H. Li, S. Preidikman, B. Balachandran, and C. D. Mote, Jr, "Nonlinear free and forced oscillations of piezoelectric microresonators," J. Micromech. Microeng., vol.16, no.2, pp. 356-367, Jan. 2006. (Pubitemid 43146240)
21. H. Li, S. Preidikman, D. J. DeVoe, and B. Balachandran, "Nonlinear oscillation of piezoelectric microresonators with curved cross-section," Sens. Actuators A, Phys., vol.144, no.1, pp. 194-200, May 2008.
22. L. Buchaillot, O. Millet, E. Quévy, and D. Collard, "Post-buckling dynamic behavior of self-assembled 3D microstructures," Microsyst. Tech-nol., vol.14, no.1, pp. 69-78, Jan. 2007.
23. A. Cabal and D. S. Ross, "Snap-through bilayer microbeam," in Proc. Tech. Int. Conf. Model. Simul. Microsyst. (Nanotech), 2002, vol.1, pp. 230-233.
24. W. Y. Poon, C. F. Ng, and Y. Y. Lee, "Dynamic stability of a curved beam under sinusoidal loading," Proc. Inst. Mech. Eng., J. Aerosp. Eng., vol.216, no.4, pp. 209-217, 2002.
25. E. M. Abdel-Rahman, M. I. Younis, and A. H. Nayfeh, " Characterization of the mechanical behavior of an electrically actuated microbeam," J. Micromech. Microeng., vol.12, no.6, pp. 766-795, Sep. 2002.
26. M. I. Younis and A. H. Nayfeh, "A study of the nonlinear response of a resonant microbeam to an electric actuation," Nonlinear Dyn., vol.31, no.1, pp. 91-117, Jan. 2003.
27. H. M. Nayfeh, M. I. Younis, and E. M. Abdel-Rahman, "Reduced-order models for MEMS applications," Nonlinear Dyn., vol.41, no.1-3, pp. 211-236, Aug. 2005.
28. M. I. Younis, E. M. Abdel-Rahman, and A. H. Nayfeh, "A reduced-order model for electrically actuated microbeam-based MEMS," J. Microelectromech. Syst., vol.12, no.5, pp. 672-680, Oct. 2003.
29. A. H. Nayfeh and M. I. Younis, "Dynamics of MEMS resonators under superharmonic and subharmonic excitations," J. Micromech. Microeng., vol.15, no.10, pp. 1840-1847, Aug. 2005.
30. A. H. Nayfeh, M. I. Younis, and E. M. Abdel-Rahman, "Dynamic pull-in phenomenon in MEMS resonators," Nonlinear Dyn., vol. 48, no. 1/2, pp. 153-163, Apr. 2007.
31. A. H. Nayfeh, Nonlinear Interactions. New York: Wiley-Interscience, 2000.
32. F. C. Moon, Chaotic Vibrations: An Introduction for Applied Scientists and Engineers. Hoboken, NJ: Wiley-Interscience, 2004.
33. S. Krylov and R. Maimon, "Pull-in dynamics of an elastic beam actuated by continuously distributed electrostatic force," J. Vib. Acoust., vol.126, no.3, pp. 332-342, Jul. 2004.
34. F. M. Alsaleem, M. I. Younis, and H. M. Ouakad, "On the nonlinear resonances and dynamic pull-in of electrostatically actuated resonators," J. Micromech. Microeng., vol.19, no.4, pp. 045 013-1-045 013-14, Mar. 2009.
35. D. Elata and H. Bamberger, "On the dynamic pull-in of electrostatic actuators with multiple degrees of freedom and multiple voltage sources," J. Microelectromech. Syst., vol.15, no.1, pp. 131-140, Feb. 2006.
36. J. Humphreys, "On dynamic snap buckling of shallow arches," AIAA J., vol.4, no.5, pp. 878-886, May 1966.
37. A. B. Pippard, "The elastic arch and its modes of instability," Eur. J. Phys., vol.11, no.6, pp. 359-365, Nov. 1990.
38. M. I. Younis and H. M. Ouakad, "The static and dynamic behavior of MEMS arches under electrostatic actuation," in Proc. 6th IEEE-ISMA, Sharjah, United Arab Emirates, Mar. 2009, pp. 1-6. DOI: 10.1109/ISMA.2009. 5164821.
39. H. M. Ouakad, M. I. Younis, F. M. Alsaleem, R. Miles, and W. Cui, "The static and dynamic behavior of MEMS arches under electrostatic actuation," presented at the ASME Int. Design Engineering Technical Conf. Computers Information Engineering Conference, San Diego, CA, Aug./Sep. 2009. Paper DETC2009-87024.
40. V. M. Varadan, K. J. Vinoy, and K. A. Jose, RF MEMS and Their Applications. New York: Wiley, 2003.