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Volumn 45, Issue 7, 2010, Pages 704-713

The dynamic behavior of MEMS arch resonators actuated electrically

Author keywords

Electrostatic force; MEMS; Non linear dynamics; Perturbation; Shallow arch; Vibrations

Indexed keywords

AC HARMONICS; AC LOAD; DC LOAD; DC VOLTAGE; DYNAMIC BEHAVIORS; EIGENVALUE PROBLEM; ELECTROSTATIC LOAD; FORCED VIBRATION RESPONSE; GALERKIN; METHOD OF MULTIPLE SCALE; MICROMACHINED; MODE SHAPES; NON-LINEAR DYNAMICS; NON-LINEARITY; NONLINEAR RESONANCE; PERTURBATION; PERTURBATION METHOD; REDUCED ORDER MODELS; RESONANCE FREQUENCIES; SHALLOW ARCH; STATIC BEHAVIORS;

EID: 77953651721     PISSN: 00207462     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijnonlinmec.2010.04.005     Document Type: Article
Times cited : (225)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.