-
1
-
-
33845539679
-
Vacuum-packaged suspended microchannel resonant mass sensor for biomolecular detection
-
Burg T.P., Mirza A.R., Milovic N., Tsau C.H., Popescu G.A., Foster J.S., and Manalis S.R. Vacuum-packaged suspended microchannel resonant mass sensor for biomolecular detection. J. Microelectromech. Syst. 15 (2006) 1466-1476
-
(2006)
J. Microelectromech. Syst.
, vol.15
, pp. 1466-1476
-
-
Burg, T.P.1
Mirza, A.R.2
Milovic, N.3
Tsau, C.H.4
Popescu, G.A.5
Foster, J.S.6
Manalis, S.R.7
-
2
-
-
27544505257
-
Inertial-grade out-of-plane and in-plane differential resonant silicon accelerometers (DRXLs)
-
Seoul, South Korea
-
H.C. Kim, S. Seok, I. Kim, S.-D. Choi, K. Chun, Inertial-grade out-of-plane and in-plane differential resonant silicon accelerometers (DRXLs), in: Transducers 05, Solid-State Sensors, Actuators and Microsystems, Seoul, South Korea, 2005.
-
(2005)
Transducers 05, Solid-State Sensors, Actuators and Microsystems
-
-
Kim, H.C.1
Seok, S.2
Kim, I.3
Choi, S.-D.4
Chun, K.5
-
3
-
-
12344264249
-
A resonant temperature sensor based on electrical spring softening
-
Munich, Germany
-
W.T. Hsu, J.R. Clark, C.T.C. Nguyen, A resonant temperature sensor based on electrical spring softening, in: Transducers 01, Eurosensors XV, The 11th International Conference on Solid-State Sensors and Actuators, Munich, Germany, 2001.
-
(2001)
Transducers 01, Eurosensors XV, The 11th International Conference on Solid-State Sensors and Actuators
-
-
Hsu, W.T.1
Clark, J.R.2
Nguyen, C.T.C.3
-
4
-
-
50049119128
-
-
B. Kim, M. Hopcroft, C.M. Jha, R. Melamud, S.A. Chandorkar, M. Agarwal, K.L. Chen, W.T. Park, R. Candler, G. Yama, A. Partridge, M. Lutz, T.W. Kenny, Using MEMS to build the device and the package, in: Transducers 07 Eurosensors, Lyon, France, 2007.
-
B. Kim, M. Hopcroft, C.M. Jha, R. Melamud, S.A. Chandorkar, M. Agarwal, K.L. Chen, W.T. Park, R. Candler, G. Yama, A. Partridge, M. Lutz, T.W. Kenny, Using MEMS to build the device and the package, in: Transducers 07 Eurosensors, Lyon, France, 2007.
-
-
-
-
5
-
-
40449106285
-
-
Vancouver, Canada
-
Kim B., Hopcroft M.A., Melamud R., Jha C.M., Agarwal M., Chandorkar S.A., and Kenny T.W. CMOS Compatible Wafer-scale Encapsulation with MEMS Resonators, ASME InterPACK (2007), Vancouver, Canada
-
(2007)
CMOS Compatible Wafer-scale Encapsulation with MEMS Resonators, ASME InterPACK
-
-
Kim, B.1
Hopcroft, M.A.2
Melamud, R.3
Jha, C.M.4
Agarwal, M.5
Chandorkar, S.A.6
Kenny, T.W.7
-
6
-
-
40449128607
-
Thermal isolation of encapsulated MEMS resonators
-
Jha C.M., Hopcroft M.A., Chandorkar S.A., Salvia J.C., Agarwal M., Candler R.N., Melamud R., Kim B., and Kenny T.W. Thermal isolation of encapsulated MEMS resonators. J. Microelectromech. Syst. 17 (2008) 175-184
-
(2008)
J. Microelectromech. Syst.
, vol.17
, pp. 175-184
-
-
Jha, C.M.1
Hopcroft, M.A.2
Chandorkar, S.A.3
Salvia, J.C.4
Agarwal, M.5
Candler, R.N.6
Melamud, R.7
Kim, B.8
Kenny, T.W.9
-
7
-
-
34247495690
-
A resonant gate silicon surface transistor with high Q bandpass properties
-
Nathanson H.C., and Wickstrom R.A. A resonant gate silicon surface transistor with high Q bandpass properties. IEEE Appl. Phys. Lett. 7 (1965) 84-86
-
(1965)
IEEE Appl. Phys. Lett.
, vol.7
, pp. 84-86
-
-
Nathanson, H.C.1
Wickstrom, R.A.2
-
9
-
-
0036544038
-
14 MHz micromechanical oscillator
-
Mattila T., Jaakkola O., Kiihamaki J., Karttunen J., Lamminmäki T., Rantakari P., Oja A., Seppä H., Kattelus H., and Tittonen I. 14 MHz micromechanical oscillator. Sensors Actuators A 97-98 (2002) 497-502
-
(2002)
Sensors Actuators A
, vol.97-98
, pp. 497-502
-
-
Mattila, T.1
Jaakkola, O.2
Kiihamaki, J.3
Karttunen, J.4
Lamminmäki, T.5
Rantakari, P.6
Oja, A.7
Seppä, H.8
Kattelus, H.9
Tittonen, I.10
-
10
-
-
38849085784
-
Modelling the dynamics of a MEMS resonator: simulations and experiments
-
Mestrom R.M.C., Fey R.H.B., van Beek J.T.M., Phan K.L., and Nijmeijer H. Modelling the dynamics of a MEMS resonator: simulations and experiments. Sensors Actuators A 142 (2008) 306-315
-
(2008)
Sensors Actuators A
, vol.142
, pp. 306-315
-
-
Mestrom, R.M.C.1
Fey, R.H.B.2
van Beek, J.T.M.3
Phan, K.L.4
Nijmeijer, H.5
-
11
-
-
0037284599
-
A study of the nonlinear response of a resonant microbeam to an electric actuation
-
Younis M.I., and Nayfeh A.H. A study of the nonlinear response of a resonant microbeam to an electric actuation. J. Nonlinear Dyn. 31 (2003) 91-117
-
(2003)
J. Nonlinear Dyn.
, vol.31
, pp. 91-117
-
-
Younis, M.I.1
Nayfeh, A.H.2
-
12
-
-
0042874104
-
On a tunable bistable MEMS-theory and experiment
-
Saif M.T.A. On a tunable bistable MEMS-theory and experiment. J. Microelectromech. Syst. 9 (2000) 157-170
-
(2000)
J. Microelectromech. Syst.
, vol.9
, pp. 157-170
-
-
Saif, M.T.A.1
-
13
-
-
0038548000
-
Self-retracting fully compliant bistable micromechanism
-
Masters N.D., and Howell L.L.A. Self-retracting fully compliant bistable micromechanism. J. Microelectromech. Syst. 12 (2003) 73-80
-
(2003)
J. Microelectromech. Syst.
, vol.12
, pp. 73-80
-
-
Masters, N.D.1
Howell, L.L.A.2
-
14
-
-
34250770015
-
A self-switching bistable artificial muscle actuator
-
Busan, Korea
-
J. Rossiter, B. Stoimenov, T. Mukai, A self-switching bistable artificial muscle actuator, in: Proceedings of the SICE-ICASE International Joint Conference, Busan, Korea, 2006.
-
(2006)
Proceedings of the SICE-ICASE International Joint Conference
-
-
Rossiter, J.1
Stoimenov, B.2
Mukai, T.3
-
15
-
-
27644524028
-
Laterally moving bistable MEMS DC switch for biomedical applications
-
Receveur R.A.M., Marxer C.R., Woering R., Larik V.C.M.H., and de Rooij N.F. Laterally moving bistable MEMS DC switch for biomedical applications. J. Microelectromech. Syst. 14 (2005) 89-98
-
(2005)
J. Microelectromech. Syst.
, vol.14
, pp. 89-98
-
-
Receveur, R.A.M.1
Marxer, C.R.2
Woering, R.3
Larik, V.C.M.H.4
de Rooij, N.F.5
-
16
-
-
42549104982
-
Bistable nanowire for micromechanical memory
-
Charlot B., Sun W., Yamashita K., Fujita H., and Toshiyoshi H. Bistable nanowire for micromechanical memory. J. Micromech. Microeng. 18 (2008) 045005-045012
-
(2008)
J. Micromech. Microeng.
, vol.18
, pp. 045005-045012
-
-
Charlot, B.1
Sun, W.2
Yamashita, K.3
Fujita, H.4
Toshiyoshi, H.5
-
18
-
-
0032162919
-
An analytical analysis of a compressed bi-stable buckled beam
-
Vangbo M. An analytical analysis of a compressed bi-stable buckled beam. Sensors Actuators A 69 (1998) 212-216
-
(1998)
Sensors Actuators A
, vol.69
, pp. 212-216
-
-
Vangbo, M.1
-
19
-
-
0029514426
-
Testing and characterization of a bi-stable snapping microactuator based on thermo-mechanical analysis
-
Stockholm, Sweden
-
Y.J. Yang, C.J. Kim, Testing and characterization of a bi-stable snapping microactuator based on thermo-mechanical analysis, in: Proceedings of the IEEE Solid State Sensor and Actuator Workshop, Stockholm, Sweden, 1995.
-
(1995)
Proceedings of the IEEE Solid State Sensor and Actuator Workshop
-
-
Yang, Y.J.1
Kim, C.J.2
-
20
-
-
0029755925
-
Bi-stable microvalves with pneumatically coupled membranes
-
San Diego, CA
-
B. Wagner, H.J. Quenzer, S. Hoershelmann, T. Lisec, M. Juerss, Bi-stable microvalves with pneumatically coupled membranes, in: Proceedings of the IEEE MEMS'96, San Diego, CA, 1996.
-
(1996)
Proceedings of the IEEE MEMS'96
-
-
Wagner, B.1
Quenzer, H.J.2
Hoershelmann, S.3
Lisec, T.4
Juerss, M.5
-
22
-
-
0036851082
-
Parametric study and optimization of a micro-optical switch with a laterally driven electromagnetic microactuator
-
Han J.S., Ko J.S., Kim Y.T., and Kwak B.M. Parametric study and optimization of a micro-optical switch with a laterally driven electromagnetic microactuator. J. Micromech. Microeng. 12 (2002) 39-47
-
(2002)
J. Micromech. Microeng.
, vol.12
, pp. 39-47
-
-
Han, J.S.1
Ko, J.S.2
Kim, Y.T.3
Kwak, B.M.4
-
23
-
-
55349131990
-
Pre-shaped buckled beam actuators: theory and experiment
-
Seunghoon P., and Dooyoung H. Pre-shaped buckled beam actuators: theory and experiment. Sensors Actuators A: Phys. 148 (2008) 186-192
-
(2008)
Sensors Actuators A: Phys.
, vol.148
, pp. 186-192
-
-
Seunghoon, P.1
Dooyoung, H.2
-
24
-
-
33745460781
-
A laterally-driven bistable electromagnetic microrelay
-
Ko J.S., Lee M.G., Han J.S., Go J.S., Shin B., and Lee D.S. A laterally-driven bistable electromagnetic microrelay. ETRI J. 28 (2006) 389-392
-
(2006)
ETRI J.
, vol.28
, pp. 389-392
-
-
Ko, J.S.1
Lee, M.G.2
Han, J.S.3
Go, J.S.4
Shin, B.5
Lee, D.S.6
-
25
-
-
33748795597
-
Design criteria for bi-stable behavior in a buckled multi-layered MEMS bridge
-
Michael A., and Kwok C.Y. Design criteria for bi-stable behavior in a buckled multi-layered MEMS bridge. J. Micromech. Microeng. 16 (2006) 34-43
-
(2006)
J. Micromech. Microeng.
, vol.16
, pp. 34-43
-
-
Michael, A.1
Kwok, C.Y.2
-
27
-
-
33847254417
-
Snap-action bistable micromechanism actuated by nonlinear resonance
-
Irvine, CA, USA
-
J. Casals-Terré, A.M. Shkel, Snap-action bistable micromechanism actuated by nonlinear resonance, in: 2005 IEEE Sensors, Irvine, CA, USA, 2005.
-
(2005)
2005 IEEE Sensors
-
-
Casals-Terré, J.1
Shkel, A.M.2
-
28
-
-
34547778546
-
Snap-through and pull-in instabilities of an arch-shaped beam under an electrostatic loading
-
Zhang Y., Wang Y., Li Z., Huang Y., and Li D. Snap-through and pull-in instabilities of an arch-shaped beam under an electrostatic loading. J. Microelectromech. Syst. 16 (2007) 684-693
-
(2007)
J. Microelectromech. Syst.
, vol.16
, pp. 684-693
-
-
Zhang, Y.1
Wang, Y.2
Li, Z.3
Huang, Y.4
Li, D.5
-
29
-
-
42949138742
-
The pull-in behavior of electrostatically actuated bistable microstructures
-
Krylov S., Ilic B.R., Schreiber D., Seretensky S., and Craighead H. The pull-in behavior of electrostatically actuated bistable microstructures. J. Micromech. Microeng. 18 (2008) 055026-055046
-
(2008)
J. Micromech. Microeng.
, vol.18
, pp. 055026-055046
-
-
Krylov, S.1
Ilic, B.R.2
Schreiber, D.3
Seretensky, S.4
Craighead, H.5
-
30
-
-
61849101929
-
Pull-in and snap-through instabilities in transient deformations of microelectromechanical systems
-
Das K., and Batra R.C. Pull-in and snap-through instabilities in transient deformations of microelectromechanical systems. J. Micromech. Microeng. 19 (2009) 035008-035027
-
(2009)
J. Micromech. Microeng.
, vol.19
, pp. 035008-035027
-
-
Das, K.1
Batra, R.C.2
-
31
-
-
34547881915
-
Post-buckling dynamic behavior of self-assembled 3D microstructures
-
Buchaillot L., Millet O., Quévy E., and Collard D. Post-buckling dynamic behavior of self-assembled 3D microstructures. Microsyst. Technol. 14 (2007) 69-78
-
(2007)
Microsyst. Technol.
, vol.14
, pp. 69-78
-
-
Buchaillot, L.1
Millet, O.2
Quévy, E.3
Collard, D.4
-
32
-
-
2442557743
-
Snap-through bilayer microbeam
-
Cabal A., and Ross D.S. Snap-through bilayer microbeam. Nanotechnology 1 (2002) 230-233
-
(2002)
Nanotechnology
, vol.1
, pp. 230-233
-
-
Cabal, A.1
Ross, D.S.2
-
34
-
-
34548200809
-
Periodic excitation of a buckled beam using a higher order semianalytic approach
-
Noijen S.P.M., Mallon N.J., Fey R.H.B., Nijmeijer H., and Zhang G.Q. Periodic excitation of a buckled beam using a higher order semianalytic approach. Nonlinear Dyn. 50 (2007) 325-339
-
(2007)
Nonlinear Dyn.
, vol.50
, pp. 325-339
-
-
Noijen, S.P.M.1
Mallon, N.J.2
Fey, R.H.B.3
Nijmeijer, H.4
Zhang, G.Q.5
-
35
-
-
33947535043
-
On dynamic snap buckling of shallow arches
-
Humphreys J. On dynamic snap buckling of shallow arches. AIAA J. 4 5 (1966) 878-886
-
(1966)
AIAA J.
, vol.4
, Issue.5
, pp. 878-886
-
-
Humphreys, J.1
-
36
-
-
0014584027
-
Dynamic stability criteria for clamped shallow arches under timewise step loads
-
Hsu C.S., Kuo C.T., and Plaut R.H. Dynamic stability criteria for clamped shallow arches under timewise step loads. AIAA J. 7 (1969) 1925-1931
-
(1969)
AIAA J.
, vol.7
, pp. 1925-1931
-
-
Hsu, C.S.1
Kuo, C.T.2
Plaut, R.H.3
-
37
-
-
2342521192
-
Dynamic buckling of some elastic shallow structures subjected to periodic loading with high frequency
-
Hung N.C. Dynamic buckling of some elastic shallow structures subjected to periodic loading with high frequency. Int. J. Solids Struct. 8 (1972) 315-326
-
(1972)
Int. J. Solids Struct.
, vol.8
, pp. 315-326
-
-
Hung, N.C.1
-
38
-
-
85058202722
-
Analysis of non-linear dynamics and bifurcations of a shallow arch subjected to periodic excitation with internal resonance
-
Bi Q., and Dai H.H. Analysis of non-linear dynamics and bifurcations of a shallow arch subjected to periodic excitation with internal resonance. J. Sound Vib. 233 (2000) 557-571
-
(2000)
J. Sound Vib.
, vol.233
, pp. 557-571
-
-
Bi, Q.1
Dai, H.H.2
-
39
-
-
0028426617
-
Non-linear dynamics of a shallow arch under periodic excitation-I. 1-2 internal resonance
-
Tien W.M., Namachchivaya N.S., and Bajaj A.K. Non-linear dynamics of a shallow arch under periodic excitation-I. 1-2 internal resonance. Int. J. Non-Linear Mech. 29 (1994) 349-366
-
(1994)
Int. J. Non-Linear Mech.
, vol.29
, pp. 349-366
-
-
Tien, W.M.1
Namachchivaya, N.S.2
Bajaj, A.K.3
-
40
-
-
0028424990
-
Non-linear dynamics of a shallow arch under periodic excitation-II. 1-1 internal resonance
-
Tien W.M., Namachchivaya N.S., and Malhorta N. Non-linear dynamics of a shallow arch under periodic excitation-II. 1-1 internal resonance. Int. J. Non-Linear Mech. 29 (1994) 367-386
-
(1994)
Int. J. Non-Linear Mech.
, vol.29
, pp. 367-386
-
-
Tien, W.M.1
Namachchivaya, N.S.2
Malhorta, N.3
-
41
-
-
29744436115
-
Three-to-one internal resonance in the nonlinear oscillation of shallow arch
-
El-Bassiouny F. Three-to-one internal resonance in the nonlinear oscillation of shallow arch. Phys. Scr. 72 (2005) 439-450
-
(2005)
Phys. Scr.
, vol.72
, pp. 439-450
-
-
El-Bassiouny, F.1
-
45
-
-
0037411958
-
Resonant non-linear normal modes. Part II: activation/orthogonality conditions for shallow structural systems
-
Lacarbonara W., and Rega G. Resonant non-linear normal modes. Part II: activation/orthogonality conditions for shallow structural systems. Int. J. Non-Linear Mech. 38 (2003) 873-887
-
(2003)
Int. J. Non-Linear Mech.
, vol.38
, pp. 873-887
-
-
Lacarbonara, W.1
Rega, G.2
-
46
-
-
0007570941
-
The elastic arch and its modes of instability
-
Pippard A.B. The elastic arch and its modes of instability. Eur. J. Phys. 11 (1990) 359-365
-
(1990)
Eur. J. Phys.
, vol.11
, pp. 359-365
-
-
Pippard, A.B.1
-
47
-
-
36448991927
-
Typical review: review of modeling electrostatically actuated microelectromechanical systems
-
Batra R.C., Porfiri M., and Spinello D. Typical review: review of modeling electrostatically actuated microelectromechanical systems. J. Micromech. Microeng. 16 (2007) R23-R31
-
(2007)
J. Micromech. Microeng.
, vol.16
-
-
Batra, R.C.1
Porfiri, M.2
Spinello, D.3
-
48
-
-
35748969365
-
Capacitance estimate for electrostatically actuated narrow microbeams
-
Batra R.C., Porfiri M., and Spinello D. Capacitance estimate for electrostatically actuated narrow microbeams. Micro Nano Lett. 1 (2006) 71-73
-
(2006)
Micro Nano Lett.
, vol.1
, pp. 71-73
-
-
Batra, R.C.1
Porfiri, M.2
Spinello, D.3
-
50
-
-
77953649876
-
-
Wolfram Research, Inc, Mathematica, Version 7.0, Champaign, IL, 2008
-
Wolfram Research, Inc., Mathematica, Version 7.0, Champaign, IL, 2008.
-
-
-
-
51
-
-
0036851112
-
Characterization of the mechanical behavior of an electrically actuated microbeam
-
Abdel-Rahman E.M., Younis M.I., and Nayfeh A.H. Characterization of the mechanical behavior of an electrically actuated microbeam. J. Micromech. Microeng. 12 (2002) 759-766
-
(2002)
J. Micromech. Microeng.
, vol.12
, pp. 759-766
-
-
Abdel-Rahman, E.M.1
Younis, M.I.2
Nayfeh, A.H.3
|