Dynamic characteristics and forced response of an electrostatically- actuated microbeam subjected to fluid loading

Microsystem Technologies

Volumn 15, Issue 9, 2009, Pages 1355-1363

  Rezazadeh, Ghader ^a   Fathalilou, Mohammad ^a   Shabani, Rasool ^a   Tarverdilou, Saeid ^a   Talebian, Soheil ^a  

^a URMIA UNIVERSITY   (Iran)

Author keywords

[No Author keywords available]

Indexed keywords

ADDED MASS; AERODYNAMIC THEORY; DC VOLTAGE; DIELECTRIC COEFFICIENT; DYNAMIC CHARACTERISTICS; FLEXURAL VIBRATIONS; FLUID LOADING; FORCED RESPONSE; GALERKIN; GOVERNING EQUATIONS; INERTIAL EFFECT; LINEARIZATION METHODS; MAXIMUM AMPLITUDE; MICRO BEAMS; NONLINEAR STATICS; PRESSURE JUMPS; PULL-IN VOLTAGE; REDUCED ORDER MODELS; RESONANCE FREQUENCIES; STATIONARY FLUIDS; STEP-BY-STEP; VACUUM CONDITION;

ASPECT RATIO; ATOMIC FORCE MICROSCOPY; DYNAMIC RESPONSE; ELECTRIC POTENTIAL; ELECTROSTATIC ACTUATORS; FLUIDS; GALERKIN METHODS; NANOCANTILEVERS; NATURAL FREQUENCIES; NONLINEAR EQUATIONS; STIFFNESS; VACUUM;

FREQUENCY RESPONSE;

EID: 68949145938     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-009-0906-2     Document Type: Article

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