Integrable active microvalve with surface micromachined curled-up actuator

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 2, Issue , 1997, Pages 833-836

  Haji Babaei, J ^a   Kwok, C Y ^a   Huang, R S ^a  

^a UNIVERSITY OF NEW SOUTH WALES   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

BULK MICROMACHINING; CANTILEVER; DIFFERENTIAL PRESSURE; ELECTROSTATIC ACTUATION; ELECTROSTATIC MICROVALVES; SURFACE MICROMACHINING; SWITCHING VOLTAGE; THERMAL OXIDATION;

ACTUATORS; ELECTROSTATIC DEVICES; FLOW OF FLUIDS; MICROMACHINING; ORIFICES; OXIDATION; PRESSURE; SILICA; VOLTAGE MEASUREMENT;

VALVES (MECHANICAL);

EID: 0030685230     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)