A novel semianalytical approach for finding pull-in voltages of micro cantilever beams subjected to electrostatic loads and residual stress gradients

Journal of Microelectromechanical Systems

Volumn 20, Issue 2, 2011, Pages 527-537

  Ou, Kuang Shun ^a   Chen, Kuo Shen ^a   Yang, Tian Shiang ^a   Lee, Sen Yung ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Electrostatic load; energy method; finite element (FE) method (FEM); micro cantilever beams; residual stress gradients

Indexed keywords

BEAM STRUCTURES; DESIGN OPTIMIZATION; ELECTROSTATIC LOAD; ENERGY METHOD; FITTED FORMULA; MEMS ACTUATORS; MICRO BEAMS; MICRO CANTILEVER BEAMS; MICROELECTROMECHANICAL SYSTEMS; PARAMETRIC STUDY; PROCESSING PARAMETERS; PULL-IN; PULL-IN VOLTAGE; RESIDUAL STRESS GRADIENTS; SEMI-ANALYTICAL; SEMIANALYTICAL APPROACH; SENSOR AND ACTUATORS; SENSORS AND ACTUATORS; SHAPE FUNCTIONS; THERMOMECHANICAL MISMATCHES;

ACTUATORS; COMPOSITE MICROMECHANICS; DESIGN; ELECTROSTATIC ACTUATORS; ELECTROSTATIC FORCE; FINITE ELEMENT METHOD; FUNCTION EVALUATION; MATHEMATICAL MODELS; MEMS; MICROELECTROMECHANICAL DEVICES; NANOCANTILEVERS; OPTIMIZATION; RESIDUAL STRESSES; SENSORS;

CANTILEVER BEAMS;

EID: 79953754299     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2011.2105246     Document Type: Article

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