Hybrid organic-inorganic sol-gel materials for micro and nanofabrication

Journal of Sol-Gel Science and Technology

Volumn 60, Issue 3, 2011, Pages 299-314

  Brusatin, Giovanna ^a   Della Giustina, Gioia ^a  

^a UNIVERSITY OF PADOVA   (Italy)

Author keywords

Electron beam lithography; Glycidoxypropyltrimethoxysilane; Hybrid organic inorganic materials; Nanoimprinting; Sol gel; UV lithography; X rays

Indexed keywords

3-GLYCIDOXYPROPYLTRIMETHOXYSILANE; CONVENTIONAL TECHNIQUES; DIRECT-PATTERNING; EMERGING MATERIALS; GLYCIDOXYPROPYLTRIMETHOXYSILANE; HYBRID ORGANIC-INORGANIC MATERIALS; LITHOGRAPHIC METHODS; NANO-IMPRINTING; NOVEL MATERIALS; ORGANIC-INORGANIC; ORGANIC-INORGANIC SOL-GEL; PATTERNING TECHNIQUES; POLYMERIC RESIST; PROCESSABILITY; PROCESSING TIME; SOL-GEL MATERIALS; SYNTHESIS PROCEDURE; SYNTHESIS STRATEGY; UV LITHOGRAPHY;

ELECTRON BEAM LITHOGRAPHY; ELECTRON BEAMS; GELS; LITHOGRAPHY; MECHANICAL STABILITY; OPTICAL PROPERTIES; ORGANIC POLYMERS; SILICON COMPOUNDS; SOL-GEL PROCESS; SOL-GELS; SOLS; X RAYS;

HYBRID MATERIALS;

EID: 84855686834     PISSN: 09280707     EISSN: None     Source Type: Journal    
DOI: 10.1007/s10971-011-2562-0     Document Type: Article

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