Interferential lithography of Bragg gratings on hybrid organic-inorganic sol-gel materials

Microelectronic Engineering

Volumn 88, Issue 8, 2011, Pages 1923-1926

  Della Giustina, G ^a   Zacco, G ^a,b,c   Zanchetta, E ^a   Gugliemi, M ^a   Romanato, F ^a,b,c   Brusatin, G ^a  

^a UNIVERSITY OF PADOVA   (Italy)

^b IOM CNR LABORATORIO TASC   (Italy)

^c Laboratory for Nanofabrication of Nanodevices   (Italy)

Author keywords

3 Glycidoxypropyltrimethoxysilane; Epoxy; Gratings; Hybrids; Interference lithography; Sol gel

Indexed keywords

CHARACTERIZATION; DIFFRACTION GRATINGS; ELECTROMAGNETIC LAUNCHERS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; LITHOGRAPHY; MOLDS; NANOIMPRINT LITHOGRAPHY; ORGANIC LASERS; PLASMONICS; SOL-GEL PROCESS; SOL-GELS; SURFACE MEASUREMENT;

3-GLYCIDOXYPROPYLTRIMETHOXYSILANE; EPOXY; HYBRID ORGANIC-INORGANIC; HYBRIDS; INTERFERENCE LITHOGRAPHY; MORPHOLOGICAL CHARACTERIZATION; NANOIMPRINTING LITHOGRAPHY; SELECTIVE DISSOLUTION;

ORGANIC-INORGANIC MATERIALS;

EID: 79960044031     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2011.01.013     Document Type: Article

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