Direct nanopattern of hybrid sol-gel films

Materials Science and Engineering C

Volumn 27, Issue 5-8 SPEC. ISS., 2007, Pages 1382-1385

  Della Giustina, G ^a   Brusatin, G ^a   Guglielmi, M ^a   Romanato, F ^b  

^a UNIVERSITY OF PADOVA   (Italy)

^b LABORATORIO TASC   (Italy)

Author keywords

Glycidoxypropyltrimethoxysilane; Hybrid organic inorganic materials; Lithography; Sol gel

Indexed keywords

CROSSLINKING; ELECTRON BEAMS; LUMINESCENCE; POLYMERIZATION; SYNCHROTRON RADIATION; THIN FILMS;

POST EXPOSURE BAKING; RHODAMINE 6G; SOL-GEL FILMS; X-RAY LITHOGRAPHY;

SOL-GELS;

EID: 34547654032     PISSN: 09284931     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.msec.2006.09.032     Document Type: Article

References (16)

1. Sanchez C., Julian B., Belleville P., and Popall M. J. Mater. Chem. 15 (2005) 3559
2. Mackenzie J.D., and Bescher E.P. J. Sol-Gel Sci. Technol. 13 (1998) 371
3. Jeong S., and Moon J. J. Non-Cryst. Solids 351 (2005) 3530
4. Zhu X.-l., and Lo D. Appl. Phys. Lett. 77-17 (2000) 2647
5. Dalton L., Harper A., Ren A., Wang F., Todorova G., Chen J., Zhang C., and Lee M. Ind. Eng. Chem. Res. 38 (1999) 8
6. Burland D.M., Miller R.D., and Walsh C.A. Chem. Rev. 94 (1994) 31
7. Abbotto A., Pagani G., Brusatin G., Innocenzi P., Guglielmi M., Meneghetti M., Signorini R., and Bozio R. SPIE 3803 (1999) 18
8. Barrett C.R. Mater. Res. Soc. Bull. XVIII 7 (1993) 3
9. Rothschild M., Bloomstein T.M., Efremow N., Fedynyshyn T.H., Fritte M., Pottebaum I., and Switkes M. Mater. Res. Soc. Bull. 30-12 (2005) 942
10. Romanato F., Di Fabrizio E., Vaccari L., Altissimo M., Cojoc D., Businaro L., and Cabrini S. Microelectron. Eng. 57-58 (2001) 101
11. Di Fabrizio E., et al. J. Phys., Condens. Matter 16 (2004) 3517
12. Liu Y., Cui T., Sunkam R.K., Coane P.J., Vasile M.J., and Geoettert J. Sens. Actuators, B, Chem. 88 (2003) 75
13. Alonso B., Massiot D., Babonneau F., Brusatin G., Della Giustina G., Kidchob T., and Innocenzi P. Chem. Mater. 17 (2005) 3172
14. Brusatin G., Della Giustina G., Guglielmi M., and Innocenzi P. Prog. Solid State Chem. 34 2-4 (2006) 223
15. Balslev S., and Romanato F. J. Vac. Sci. Technol., B 23-26 (2005) 1
16. Aoki T., Kondo M., Ishii M., Sugama A., Tsukada M., Kurihara K., and Kuwabara M. J. Eur. Ceram. Soc. 25 (2005) 2917