Top-gathering pillar array of hybrid organic-inorganic material by means of self-organization

Applied Physics A: Materials Science and Processing

Volumn 83, Issue 3, 2006, Pages 447-451

  Segawa, H ^a,b   Yamaguchi, S ^a   Yamazaki, Y ^a   Yano, T ^a   Shibata, S ^a   Misawa, H ^c  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^c HOKKAIDO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

INORGANIC COMPOUNDS; LIGHT; LITHOGRAPHY;

MASK LITHOGRAPHY; MULTI-BEAM INTERFERENCE LITHOGRAPHY; SELF ORGANIZATION; TOP-GATHERING;

ORGANIC COMPOUNDS;

EID: 33645277795     PISSN: 09478396     EISSN: 14320630     Source Type: Journal    
DOI: 10.1007/s00339-006-3568-2     Document Type: Article

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