New hybrid organic-inorganic sol-gel positive resist

Microelectronic Engineering

Volumn 87, Issue 5-8, 2010, Pages 947-950

  Brigo, L ^a   Pistore, A ^a   Grenci, G ^b   Carpentiero, A ^b   Romanato, F ^a,b,c   Brusatin, G ^a  

^a UNIVERSITY OF PADOVA   (Italy)

^b LABORATORIO TASC   (Italy)

^c LaNN   (Italy)

Author keywords

Hybrid organic inorganic materials; Positive resists; Sol gel; X ray lithography

Indexed keywords

ACIDIC AQUEOUS SOLUTION; CONVENTIONAL PHOTOLITHOGRAPHY; DISTINCTIVE FEATURES; EDGE DEFINITION; ELECTRO-OPTICAL; FABRICATION TECHNIQUE; HIGH CONTRAST; HYBRID ORGANIC-INORGANIC MATERIALS; LOW TEMPERATURES; NANOPATTERNING; ORGANIC-INORGANIC SOL-GEL; POLYSILSESQUIOXANES; POROUS STRUCTURES; POSITIVE RESISTS; POSITIVE TONE; POST-EXPOSURE; SACRIFICIAL LAYER; SOFT X-RAY; STRUCTURAL CHANGE; SUBMICRON; SYSTEMATIC INVESTIGATIONS; TRIETHOXYSILYL; X RAY IRRADIATION; X-RAY EXPOSURE; X-RAY SYNCHROTRON RADIATION;

BENZENE; GELS; HYBRID MATERIALS; OPTICAL PROPERTIES; SOL-GEL PROCESS; SOLS; STRUCTURAL PROPERTIES; X RAY LITHOGRAPHY; X RAYS;

SOL-GELS;

EID: 77149128662     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.11.151     Document Type: Article

References (14)

1. Della Giustina G., Brusatin G., Guglielmi M., and Romanato F. Mater. Sci. Eng. C 27 (2007) 1382-1385
2. Falcaro P., Costacurta S., Malfatti L., et al. Adv. Mater. 20 (2008) 1864-1869
3. Della Giustina G., Guglielmi M., Brusatin G., Prasciolu M., and Romanato F. J. Sol-Gel. Sci. Technol. 48 (2008) 212-216
4. Brusatin G., Della Giustina G., Romanato F., and Guglielmi M. Nanotechnology 19 (2008) 175306
5. Sanchez C., Julian B., Belleville P., and Popall M. J. Mater. Chem. 15 (2005) 3559-3592
6. Loy D.A., and Shea K.J. Chem. Rev. 95 (1995) 1431-1442
7. Kang H.K., Wong C.C., Romanato F., Pistore A., and Brusatin G. Int. J. Nanosci. 8 (2009) 131-135
8. A. Pistore, S. Schutzmann, H.K. Kan, C. Ferraris, F. Romanato, M. Guglielmi, G. Brusatin, Structural and optical characterization of highly porous thin sol-gel films obtained from aryl polysilsesquioxane precursors, in preparation.
9. Brinker C.J., and Scherer G.W. Sol-Gel Science (1990), Academic Press, San Diego
10. Cerveau G., Corriu R.J.P., and Framery E. J. Mater. Chem. 10 (2000) 1617-1622
11. Romanato F., Di Fabrizio E., Vaccari L., Altissimo M., Cojoc D., Businaro L., and Cabrini S. Microelectron. Eng. 57-58 (2001) 101
12. Di Fabrizio E., et al. J. Phys.: Condens. Matter 16 (2004) 3517
13. Palik E.D. Handbook of Optical Constants of Solids (1985), Academic Press, New York
14. SPIE Handbook of Microlithography, Micromachining and Microfabrication, vol. 1, 1997 (Section 2.7).