Doubly patternable epoxy based sol-gel structures by UV and soft lithography

Solid State Sciences

Volumn 12, Issue 11, 2010, Pages 1890-1893

  Della Giustina, G ^a   Brusatin, G ^a   Guglielmi, M ^a   Palazzesi, C ^b   Orsini, E ^b   Prosposito, P ^b  

^a UNIVERSITY OF PADOVA   (Italy)

^b UNIVERSITY OF ROME TOR VERGATA   (Italy)

Author keywords

Epoxy; Glycidoxypropyltrimethoxysilane; Hybrid organic inorganic materials; Imprinting; Sol gel; UV lithography

Indexed keywords

CHARACTERIZATION; GERMANIUM COMPOUNDS; ORGANIC-INORGANIC MATERIALS; PHOTOPOLYMERIZATION; REFRACTIVE INDEX; SILICON COMPOUNDS; SOL-GEL PROCESS;

EPOXY; GLYCIDOXYPROPYLTRIMETHOXYSILANE; HYBRID ORGANIC-INORGANIC MATERIALS; IMPRINTING; UV LITHOGRAPHY;

SOL-GELS;

EID: 77958512340     PISSN: 12932558     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.solidstatesciences.2010.04.016     Document Type: Article

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